JPS57199224A - Semiconductor device - Google Patents
Semiconductor deviceInfo
- Publication number
- JPS57199224A JPS57199224A JP56084758A JP8475881A JPS57199224A JP S57199224 A JPS57199224 A JP S57199224A JP 56084758 A JP56084758 A JP 56084758A JP 8475881 A JP8475881 A JP 8475881A JP S57199224 A JPS57199224 A JP S57199224A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- silicon nitride
- glass layer
- melting point
- low melting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
Abstract
PURPOSE:To prevent a silicon nitride layer from cracking and improve moisture resistant property and reliability by providing an insulation material layer which becomes soft at low temperature under the silicon nitride layer for surface protection. CONSTITUTION:A diffusion layer 2 is formed on the surface of a semiconductor substrate 1 and the contact between an aluminum wiring 4 and the diffusion layer 2 is got through a hole drilled in a silicon dioxide layer 3. Then a phosphorus silica to glass layer 5 is formed on the sluminum wiring 4 on the silicon dioxide layer 3 as a protection film against moisture or impurity which penetrate from the outside. Then a PbO-B2O3-SiO2 syste low melting point glass layer 7 is formed on the phosphorus glass layer 5. Then a silicon nitride layer 6 is formed on the low melting point glass layer 7.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56084758A JPS57199224A (en) | 1981-06-02 | 1981-06-02 | Semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56084758A JPS57199224A (en) | 1981-06-02 | 1981-06-02 | Semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57199224A true JPS57199224A (en) | 1982-12-07 |
JPS6356704B2 JPS6356704B2 (en) | 1988-11-09 |
Family
ID=13839577
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP56084758A Granted JPS57199224A (en) | 1981-06-02 | 1981-06-02 | Semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57199224A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2625839A1 (en) * | 1988-01-13 | 1989-07-13 | Sgs Thomson Microelectronics | METHOD OF PASSIVATING AN INTEGRATED CIRCUIT |
EP1237182A3 (en) * | 2001-02-19 | 2002-10-02 | Applied Materials, Inc. | Aggregate dielectric layer to reduce nitride consumption |
JP2006043813A (en) * | 2004-08-04 | 2006-02-16 | Denso Corp | Micro-system structure with protective film and manufacturing method thereof |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5390869A (en) * | 1977-01-21 | 1978-08-10 | Hitachi Ltd | Manufacture of semiconductor device |
JPS5632732A (en) * | 1979-08-27 | 1981-04-02 | Mitsubishi Electric Corp | Semiconductor device |
-
1981
- 1981-06-02 JP JP56084758A patent/JPS57199224A/en active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5390869A (en) * | 1977-01-21 | 1978-08-10 | Hitachi Ltd | Manufacture of semiconductor device |
JPS5632732A (en) * | 1979-08-27 | 1981-04-02 | Mitsubishi Electric Corp | Semiconductor device |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2625839A1 (en) * | 1988-01-13 | 1989-07-13 | Sgs Thomson Microelectronics | METHOD OF PASSIVATING AN INTEGRATED CIRCUIT |
EP1237182A3 (en) * | 2001-02-19 | 2002-10-02 | Applied Materials, Inc. | Aggregate dielectric layer to reduce nitride consumption |
US6514882B2 (en) | 2001-02-19 | 2003-02-04 | Applied Materials, Inc. | Aggregate dielectric layer to reduce nitride consumption |
SG97230A1 (en) * | 2001-02-19 | 2003-07-18 | Applied Materials Inc | Aggregate dielectric layer to reduce nitride consumption |
JP2006043813A (en) * | 2004-08-04 | 2006-02-16 | Denso Corp | Micro-system structure with protective film and manufacturing method thereof |
Also Published As
Publication number | Publication date |
---|---|
JPS6356704B2 (en) | 1988-11-09 |
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