JPS57191292A - Graphite crucible for preparing single crystal of semiconductor - Google Patents

Graphite crucible for preparing single crystal of semiconductor

Info

Publication number
JPS57191292A
JPS57191292A JP56075523A JP7552381A JPS57191292A JP S57191292 A JPS57191292 A JP S57191292A JP 56075523 A JP56075523 A JP 56075523A JP 7552381 A JP7552381 A JP 7552381A JP S57191292 A JPS57191292 A JP S57191292A
Authority
JP
Japan
Prior art keywords
graphite
crucible
graphite crucible
occurrence
thermal expansion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56075523A
Other languages
English (en)
Japanese (ja)
Other versions
JPS613316B2 (enExample
Inventor
Hiroshi Yamazaki
Katsumi Hoshina
Yasumi Sasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Coorstek KK
Original Assignee
Toshiba Ceramics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Ceramics Co Ltd filed Critical Toshiba Ceramics Co Ltd
Priority to JP56075523A priority Critical patent/JPS57191292A/ja
Publication of JPS57191292A publication Critical patent/JPS57191292A/ja
Publication of JPS613316B2 publication Critical patent/JPS613316B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Ceramic Products (AREA)
  • Crucibles And Fluidized-Bed Furnaces (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP56075523A 1981-05-19 1981-05-19 Graphite crucible for preparing single crystal of semiconductor Granted JPS57191292A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56075523A JPS57191292A (en) 1981-05-19 1981-05-19 Graphite crucible for preparing single crystal of semiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56075523A JPS57191292A (en) 1981-05-19 1981-05-19 Graphite crucible for preparing single crystal of semiconductor

Publications (2)

Publication Number Publication Date
JPS57191292A true JPS57191292A (en) 1982-11-25
JPS613316B2 JPS613316B2 (enExample) 1986-01-31

Family

ID=13578671

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56075523A Granted JPS57191292A (en) 1981-05-19 1981-05-19 Graphite crucible for preparing single crystal of semiconductor

Country Status (1)

Country Link
JP (1) JPS57191292A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58156595A (ja) * 1982-03-08 1983-09-17 Ibiden Co Ltd シリコン単結晶引上げ装置用黒鉛ルツボ
KR100818859B1 (ko) * 2002-07-25 2008-04-01 도요탄소 가부시키가이샤 단결정 인상용 흑연재료와 그 제조방법
CN117444216A (zh) * 2023-10-31 2024-01-26 杨吉刚 锝气体发生装置用石墨坩埚的材料选择及加工检测方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5183004A (enExample) * 1974-12-18 1976-07-21 Toshiba Ceramics Co
JPS5358496A (en) * 1976-11-05 1978-05-26 Agency Of Ind Science & Technol Production of graphite substrate for oxidation resistant coating
JPS5456095A (en) * 1977-10-12 1979-05-04 Toshiba Ceramics Co Carbon baseematerial for sic coating
JPS54157778A (en) * 1978-06-02 1979-12-12 Toshiba Ceramics Co Susceptor

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5183004A (enExample) * 1974-12-18 1976-07-21 Toshiba Ceramics Co
JPS5358496A (en) * 1976-11-05 1978-05-26 Agency Of Ind Science & Technol Production of graphite substrate for oxidation resistant coating
JPS5456095A (en) * 1977-10-12 1979-05-04 Toshiba Ceramics Co Carbon baseematerial for sic coating
JPS54157778A (en) * 1978-06-02 1979-12-12 Toshiba Ceramics Co Susceptor

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58156595A (ja) * 1982-03-08 1983-09-17 Ibiden Co Ltd シリコン単結晶引上げ装置用黒鉛ルツボ
KR100818859B1 (ko) * 2002-07-25 2008-04-01 도요탄소 가부시키가이샤 단결정 인상용 흑연재료와 그 제조방법
CN117444216A (zh) * 2023-10-31 2024-01-26 杨吉刚 锝气体发生装置用石墨坩埚的材料选择及加工检测方法

Also Published As

Publication number Publication date
JPS613316B2 (enExample) 1986-01-31

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