JPS538375A - Method and apparatus for pulling up single crystal - Google Patents

Method and apparatus for pulling up single crystal

Info

Publication number
JPS538375A
JPS538375A JP8267276A JP8267276A JPS538375A JP S538375 A JPS538375 A JP S538375A JP 8267276 A JP8267276 A JP 8267276A JP 8267276 A JP8267276 A JP 8267276A JP S538375 A JPS538375 A JP S538375A
Authority
JP
Japan
Prior art keywords
single crystal
formation
pulling
crucible
pulled
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8267276A
Other languages
Japanese (ja)
Other versions
JPS6012318B2 (en
Inventor
Toshihiko Suzuki
Yasunori Okubo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP8267276A priority Critical patent/JPS6012318B2/en
Publication of JPS538375A publication Critical patent/JPS538375A/en
Publication of JPS6012318B2 publication Critical patent/JPS6012318B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)

Abstract

PURPOSE: To prevent the formation of polycrystalline substance, the formation of dislocation and the twin formation in the pulled-up single crystal, by blowing an inert gas into the space formed with the molten liquid, the crucible and the pulled-up plate and by bringing out the substances of different kind sticking to the wall surface outside the crucible.
COPYRIGHT: (C)1978,JPO&Japio
JP8267276A 1976-07-12 1976-07-12 Single crystal pulling method and device Expired JPS6012318B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8267276A JPS6012318B2 (en) 1976-07-12 1976-07-12 Single crystal pulling method and device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8267276A JPS6012318B2 (en) 1976-07-12 1976-07-12 Single crystal pulling method and device

Publications (2)

Publication Number Publication Date
JPS538375A true JPS538375A (en) 1978-01-25
JPS6012318B2 JPS6012318B2 (en) 1985-04-01

Family

ID=13780904

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8267276A Expired JPS6012318B2 (en) 1976-07-12 1976-07-12 Single crystal pulling method and device

Country Status (1)

Country Link
JP (1) JPS6012318B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0446088A (en) * 1990-06-12 1992-02-17 Nippon Steel Corp Method and apparatus for producing single crystal
JPH05279172A (en) * 1991-04-20 1993-10-26 Komatsu Denshi Kinzoku Kk Method and apparatus for growing crystal

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0446088A (en) * 1990-06-12 1992-02-17 Nippon Steel Corp Method and apparatus for producing single crystal
JPH05279172A (en) * 1991-04-20 1993-10-26 Komatsu Denshi Kinzoku Kk Method and apparatus for growing crystal
JP2509477B2 (en) * 1991-04-20 1996-06-19 コマツ電子金属株式会社 Crystal growth method and crystal growth apparatus

Also Published As

Publication number Publication date
JPS6012318B2 (en) 1985-04-01

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