JPS54157778A - Susceptor - Google Patents
SusceptorInfo
- Publication number
- JPS54157778A JPS54157778A JP6632478A JP6632478A JPS54157778A JP S54157778 A JPS54157778 A JP S54157778A JP 6632478 A JP6632478 A JP 6632478A JP 6632478 A JP6632478 A JP 6632478A JP S54157778 A JPS54157778 A JP S54157778A
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Insulating Bodies (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6632478A JPS54157778A (en) | 1978-06-02 | 1978-06-02 | Susceptor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6632478A JPS54157778A (en) | 1978-06-02 | 1978-06-02 | Susceptor |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS54157778A true JPS54157778A (en) | 1979-12-12 |
JPS6140640B2 JPS6140640B2 (en) | 1986-09-10 |
Family
ID=13312534
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6632478A Granted JPS54157778A (en) | 1978-06-02 | 1978-06-02 | Susceptor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54157778A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57191292A (en) * | 1981-05-19 | 1982-11-25 | Toshiba Ceramics Co Ltd | Graphite crucible for preparing single crystal of semiconductor |
JPS62123094A (en) * | 1985-11-22 | 1987-06-04 | Denki Kagaku Kogyo Kk | Susceptor for vapor growth of semiconductor |
US6383302B2 (en) * | 1997-12-02 | 2002-05-07 | Nec Corporation | Apparatus and method for manufacturing semiconductor device |
-
1978
- 1978-06-02 JP JP6632478A patent/JPS54157778A/en active Granted
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57191292A (en) * | 1981-05-19 | 1982-11-25 | Toshiba Ceramics Co Ltd | Graphite crucible for preparing single crystal of semiconductor |
JPS613316B2 (en) * | 1981-05-19 | 1986-01-31 | Toshiba Ceramics Co | |
JPS62123094A (en) * | 1985-11-22 | 1987-06-04 | Denki Kagaku Kogyo Kk | Susceptor for vapor growth of semiconductor |
JPH0566919B2 (en) * | 1985-11-22 | 1993-09-22 | Denki Kagaku Kogyo Kk | |
US6383302B2 (en) * | 1997-12-02 | 2002-05-07 | Nec Corporation | Apparatus and method for manufacturing semiconductor device |
Also Published As
Publication number | Publication date |
---|---|
JPS6140640B2 (en) | 1986-09-10 |
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