JPS57181124A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS57181124A
JPS57181124A JP6521481A JP6521481A JPS57181124A JP S57181124 A JPS57181124 A JP S57181124A JP 6521481 A JP6521481 A JP 6521481A JP 6521481 A JP6521481 A JP 6521481A JP S57181124 A JPS57181124 A JP S57181124A
Authority
JP
Japan
Prior art keywords
wiring
onto
organic solvent
film
oxide film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6521481A
Other languages
English (en)
Other versions
JPS6318859B2 (ja
Inventor
Kazuo Yamaguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP6521481A priority Critical patent/JPS57181124A/ja
Publication of JPS57181124A publication Critical patent/JPS57181124A/ja
Publication of JPS6318859B2 publication Critical patent/JPS6318859B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Local Oxidation Of Silicon (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP6521481A 1981-05-01 1981-05-01 Manufacture of semiconductor device Granted JPS57181124A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6521481A JPS57181124A (en) 1981-05-01 1981-05-01 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6521481A JPS57181124A (en) 1981-05-01 1981-05-01 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS57181124A true JPS57181124A (en) 1982-11-08
JPS6318859B2 JPS6318859B2 (ja) 1988-04-20

Family

ID=13280430

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6521481A Granted JPS57181124A (en) 1981-05-01 1981-05-01 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS57181124A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007189095A (ja) * 2006-01-13 2007-07-26 Fuji Electric Systems Co Ltd シリコン多層配線基板の製造方法及びシリコン多層配線基板の評価方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5122900A (en) * 1974-08-13 1976-02-23 Japan Tobacco & Salt Public Tabakono kokitsumi kairyoho
JPS5141516A (ja) * 1974-10-07 1976-04-07 Nippon Musical Instruments Mfg
JPS5212588A (en) * 1975-07-21 1977-01-31 Hitachi Ltd Production method of semi-conductor device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5122900A (en) * 1974-08-13 1976-02-23 Japan Tobacco & Salt Public Tabakono kokitsumi kairyoho
JPS5141516A (ja) * 1974-10-07 1976-04-07 Nippon Musical Instruments Mfg
JPS5212588A (en) * 1975-07-21 1977-01-31 Hitachi Ltd Production method of semi-conductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007189095A (ja) * 2006-01-13 2007-07-26 Fuji Electric Systems Co Ltd シリコン多層配線基板の製造方法及びシリコン多層配線基板の評価方法

Also Published As

Publication number Publication date
JPS6318859B2 (ja) 1988-04-20

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