JPS5212588A - Production method of semi-conductor device - Google Patents
Production method of semi-conductor deviceInfo
- Publication number
- JPS5212588A JPS5212588A JP8830375A JP8830375A JPS5212588A JP S5212588 A JPS5212588 A JP S5212588A JP 8830375 A JP8830375 A JP 8830375A JP 8830375 A JP8830375 A JP 8830375A JP S5212588 A JPS5212588 A JP S5212588A
- Authority
- JP
- Japan
- Prior art keywords
- semi
- conductor device
- production method
- production
- prevent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Weting (AREA)
Abstract
PURPOSE: In a semi-conductor device with a multilayer wiring, to prevent the production of hillocks by forming a non-porous alminum oxide film on the surface of Al wiring, and besides to prevent the production of a crack of a film (SOG (Spin on Glass) + PSG (phospho-silicate glass) to be formed on the above aluminium oxide film.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8830375A JPS5212588A (en) | 1975-07-21 | 1975-07-21 | Production method of semi-conductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8830375A JPS5212588A (en) | 1975-07-21 | 1975-07-21 | Production method of semi-conductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5212588A true JPS5212588A (en) | 1977-01-31 |
Family
ID=13939150
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8830375A Pending JPS5212588A (en) | 1975-07-21 | 1975-07-21 | Production method of semi-conductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5212588A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5643743A (en) * | 1979-09-17 | 1981-04-22 | Fujitsu Ltd | Manufacture of semiconductor device |
JPS57181124A (en) * | 1981-05-01 | 1982-11-08 | Oki Electric Ind Co Ltd | Manufacture of semiconductor device |
-
1975
- 1975-07-21 JP JP8830375A patent/JPS5212588A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5643743A (en) * | 1979-09-17 | 1981-04-22 | Fujitsu Ltd | Manufacture of semiconductor device |
JPS57181124A (en) * | 1981-05-01 | 1982-11-08 | Oki Electric Ind Co Ltd | Manufacture of semiconductor device |
JPS6318859B2 (en) * | 1981-05-01 | 1988-04-20 | Oki Electric Ind Co Ltd |
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