JPS5252576A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS5252576A JPS5252576A JP12859875A JP12859875A JPS5252576A JP S5252576 A JPS5252576 A JP S5252576A JP 12859875 A JP12859875 A JP 12859875A JP 12859875 A JP12859875 A JP 12859875A JP S5252576 A JPS5252576 A JP S5252576A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor device
- oxide film
- film
- psg film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Formation Of Insulating Films (AREA)
Abstract
PURPOSE: To prevent the disconnection of wiring to be formed later and reduce the steps of process through diffusion of P by provididng an oxide film and PSG film on a semiconductor element, opening a window therein, and melting the PSG film in gas containing P thus forming a taper to the serration of the oxide film.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50128598A JPS584817B2 (en) | 1975-10-25 | 1975-10-25 | hand tai souchi no seizou houhou |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50128598A JPS584817B2 (en) | 1975-10-25 | 1975-10-25 | hand tai souchi no seizou houhou |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5252576A true JPS5252576A (en) | 1977-04-27 |
JPS584817B2 JPS584817B2 (en) | 1983-01-27 |
Family
ID=14988720
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50128598A Expired JPS584817B2 (en) | 1975-10-25 | 1975-10-25 | hand tai souchi no seizou houhou |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS584817B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57106148A (en) * | 1980-12-24 | 1982-07-01 | Fujitsu Ltd | Manufacture of semiconductor device |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62182508U (en) * | 1986-05-09 | 1987-11-19 | ||
JPS63182188U (en) * | 1987-05-15 | 1988-11-24 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4911029A (en) * | 1972-05-25 | 1974-01-31 |
-
1975
- 1975-10-25 JP JP50128598A patent/JPS584817B2/en not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4911029A (en) * | 1972-05-25 | 1974-01-31 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57106148A (en) * | 1980-12-24 | 1982-07-01 | Fujitsu Ltd | Manufacture of semiconductor device |
JPS6157703B2 (en) * | 1980-12-24 | 1986-12-08 | Fujitsu Ltd |
Also Published As
Publication number | Publication date |
---|---|
JPS584817B2 (en) | 1983-01-27 |
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