JPS5381095A - Thin film formation method of semiconductor integrated circuit - Google Patents
Thin film formation method of semiconductor integrated circuitInfo
- Publication number
- JPS5381095A JPS5381095A JP15835776A JP15835776A JPS5381095A JP S5381095 A JPS5381095 A JP S5381095A JP 15835776 A JP15835776 A JP 15835776A JP 15835776 A JP15835776 A JP 15835776A JP S5381095 A JPS5381095 A JP S5381095A
- Authority
- JP
- Japan
- Prior art keywords
- integrated circuit
- semiconductor integrated
- thin film
- film formation
- formation method
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To achieve the improvement in the accuracy of thin-film patterns and the prevention of step-cutting of metal wirings by selectively forming specified films such as of thin-films for metal wirings, insulation films, semiconductor films on a semiconductor integrated circuit surface and removing unevenness by keeping the plane structure of integrated circuits.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15835776A JPS5381095A (en) | 1976-12-27 | 1976-12-27 | Thin film formation method of semiconductor integrated circuit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15835776A JPS5381095A (en) | 1976-12-27 | 1976-12-27 | Thin film formation method of semiconductor integrated circuit |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5381095A true JPS5381095A (en) | 1978-07-18 |
Family
ID=15669889
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15835776A Pending JPS5381095A (en) | 1976-12-27 | 1976-12-27 | Thin film formation method of semiconductor integrated circuit |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5381095A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59177919A (en) * | 1983-03-28 | 1984-10-08 | Nippon Telegr & Teleph Corp <Ntt> | Selective growth of thin film |
CN111868809A (en) * | 2018-03-28 | 2020-10-30 | 夏普株式会社 | Display device and method for manufacturing display device |
-
1976
- 1976-12-27 JP JP15835776A patent/JPS5381095A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59177919A (en) * | 1983-03-28 | 1984-10-08 | Nippon Telegr & Teleph Corp <Ntt> | Selective growth of thin film |
CN111868809A (en) * | 2018-03-28 | 2020-10-30 | 夏普株式会社 | Display device and method for manufacturing display device |
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