JPS5715514A - Manufacture for reed screen electrode for elastic surface wave - Google Patents

Manufacture for reed screen electrode for elastic surface wave

Info

Publication number
JPS5715514A
JPS5715514A JP8981280A JP8981280A JPS5715514A JP S5715514 A JPS5715514 A JP S5715514A JP 8981280 A JP8981280 A JP 8981280A JP 8981280 A JP8981280 A JP 8981280A JP S5715514 A JPS5715514 A JP S5715514A
Authority
JP
Japan
Prior art keywords
film
substrate
manufacture
electrode
screen electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8981280A
Other languages
English (en)
Other versions
JPH0154883B2 (ja
Inventor
Kiyoshi Asakawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP8981280A priority Critical patent/JPS5715514A/ja
Publication of JPS5715514A publication Critical patent/JPS5715514A/ja
Publication of JPH0154883B2 publication Critical patent/JPH0154883B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
JP8981280A 1980-07-01 1980-07-01 Manufacture for reed screen electrode for elastic surface wave Granted JPS5715514A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8981280A JPS5715514A (en) 1980-07-01 1980-07-01 Manufacture for reed screen electrode for elastic surface wave

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8981280A JPS5715514A (en) 1980-07-01 1980-07-01 Manufacture for reed screen electrode for elastic surface wave

Publications (2)

Publication Number Publication Date
JPS5715514A true JPS5715514A (en) 1982-01-26
JPH0154883B2 JPH0154883B2 (ja) 1989-11-21

Family

ID=13981136

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8981280A Granted JPS5715514A (en) 1980-07-01 1980-07-01 Manufacture for reed screen electrode for elastic surface wave

Country Status (1)

Country Link
JP (1) JPS5715514A (ja)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61502930A (ja) * 1984-08-01 1986-12-11 エイ・ティ・アンド・ティ・コーポレーション 改良された表面音波フィルタ
JPH02149114A (ja) * 1988-11-30 1990-06-07 Nippon Dempa Kogyo Co Ltd 弾性表面波装置
JPH02288609A (ja) * 1989-04-28 1990-11-28 Murata Mfg Co Ltd 表面波装置
WO1996004713A1 (fr) * 1994-08-05 1996-02-15 Japan Energy Corporation Dispositif a ondes acoustiques de surface et procede de production
JPH08204483A (ja) * 1995-01-27 1996-08-09 Nec Corp 弾性表面波装置の製造方法、および、これを用いて製造された弾性表面波装置

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61502930A (ja) * 1984-08-01 1986-12-11 エイ・ティ・アンド・ティ・コーポレーション 改良された表面音波フィルタ
JPH02149114A (ja) * 1988-11-30 1990-06-07 Nippon Dempa Kogyo Co Ltd 弾性表面波装置
JPH02288609A (ja) * 1989-04-28 1990-11-28 Murata Mfg Co Ltd 表面波装置
WO1996004713A1 (fr) * 1994-08-05 1996-02-15 Japan Energy Corporation Dispositif a ondes acoustiques de surface et procede de production
US5923231A (en) * 1994-08-05 1999-07-13 Kinseki Limited Surface acoustic wave device with an electrode insulating film and method for fabricating the same
JPH08204483A (ja) * 1995-01-27 1996-08-09 Nec Corp 弾性表面波装置の製造方法、および、これを用いて製造された弾性表面波装置

Also Published As

Publication number Publication date
JPH0154883B2 (ja) 1989-11-21

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