JPS5452473A - Forming method for coating for fine pattern - Google Patents
Forming method for coating for fine patternInfo
- Publication number
- JPS5452473A JPS5452473A JP11923677A JP11923677A JPS5452473A JP S5452473 A JPS5452473 A JP S5452473A JP 11923677 A JP11923677 A JP 11923677A JP 11923677 A JP11923677 A JP 11923677A JP S5452473 A JPS5452473 A JP S5452473A
- Authority
- JP
- Japan
- Prior art keywords
- mask
- coating
- film
- width
- fine pattern
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Weting (AREA)
Abstract
PURPOSE: To form a coating for a fine pattern with high precision by utilizing a resist mask which has a pattern equivalent to a desired pattern and whose section is formed in a canopy shape.
CONSTITUTION: On glass plate 1, mask coating 2 and positive resist 3 are formed. By electron beam 4, exposure and development are done to form mask 3a with the canopy-shaped section. At this time, adjustments of beam acceleration energy, irradiation amount, resist thickness, exposure degree, material of mask coating 2, and developing method are made so that width difference l2-l1 of the section will be a desired value. Next, film 2 is etched to form mask coating 2 of width l2. Then, vapordepositing coatings 5a and 5b makes the width of film 5b l1. Nest, film 5a is lift off, so that the mask with films 2a and 5a at a gap of approximate 1/2×(l2kll1) can be obtained on substrate 1
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11923677A JPS5452473A (en) | 1977-10-03 | 1977-10-03 | Forming method for coating for fine pattern |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11923677A JPS5452473A (en) | 1977-10-03 | 1977-10-03 | Forming method for coating for fine pattern |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5452473A true JPS5452473A (en) | 1979-04-25 |
Family
ID=14756323
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11923677A Pending JPS5452473A (en) | 1977-10-03 | 1977-10-03 | Forming method for coating for fine pattern |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5452473A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5637630A (en) * | 1979-09-05 | 1981-04-11 | Fujitsu Ltd | Formation of thin film |
JPS5718326A (en) * | 1980-07-09 | 1982-01-30 | Mitsubishi Electric Corp | Pattern formation |
-
1977
- 1977-10-03 JP JP11923677A patent/JPS5452473A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5637630A (en) * | 1979-09-05 | 1981-04-11 | Fujitsu Ltd | Formation of thin film |
JPS5718326A (en) * | 1980-07-09 | 1982-01-30 | Mitsubishi Electric Corp | Pattern formation |
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