JPS57133649A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS57133649A
JPS57133649A JP2072181A JP2072181A JPS57133649A JP S57133649 A JPS57133649 A JP S57133649A JP 2072181 A JP2072181 A JP 2072181A JP 2072181 A JP2072181 A JP 2072181A JP S57133649 A JPS57133649 A JP S57133649A
Authority
JP
Japan
Prior art keywords
film
crystal
insulating film
mustache
wiring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2072181A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6248897B2 (enrdf_load_stackoverflow
Inventor
Hideaki Itakura
Katsuhiro Hirata
Haruhiko Abe
Masahiro Yoneda
Kyusaku Nishioka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP2072181A priority Critical patent/JPS57133649A/ja
Publication of JPS57133649A publication Critical patent/JPS57133649A/ja
Publication of JPS6248897B2 publication Critical patent/JPS6248897B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP2072181A 1981-02-12 1981-02-12 Manufacture of semiconductor device Granted JPS57133649A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2072181A JPS57133649A (en) 1981-02-12 1981-02-12 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2072181A JPS57133649A (en) 1981-02-12 1981-02-12 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS57133649A true JPS57133649A (en) 1982-08-18
JPS6248897B2 JPS6248897B2 (enrdf_load_stackoverflow) 1987-10-16

Family

ID=12035028

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2072181A Granted JPS57133649A (en) 1981-02-12 1981-02-12 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS57133649A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6248897B2 (enrdf_load_stackoverflow) 1987-10-16

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