JPS57121253A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS57121253A JPS57121253A JP818381A JP818381A JPS57121253A JP S57121253 A JPS57121253 A JP S57121253A JP 818381 A JP818381 A JP 818381A JP 818381 A JP818381 A JP 818381A JP S57121253 A JPS57121253 A JP S57121253A
- Authority
- JP
- Japan
- Prior art keywords
- film
- hole
- projection
- exposed part
- forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP818381A JPS57121253A (en) | 1981-01-21 | 1981-01-21 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP818381A JPS57121253A (en) | 1981-01-21 | 1981-01-21 | Manufacture of semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57121253A true JPS57121253A (en) | 1982-07-28 |
JPS6248898B2 JPS6248898B2 (ja) | 1987-10-16 |
Family
ID=11686184
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP818381A Granted JPS57121253A (en) | 1981-01-21 | 1981-01-21 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57121253A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6054455A (ja) * | 1983-09-05 | 1985-03-28 | Mitsubishi Electric Corp | 半導体装置の製造方法 |
JPS63221649A (ja) * | 1987-03-10 | 1988-09-14 | Nec Corp | 半導体装置の配線構造 |
-
1981
- 1981-01-21 JP JP818381A patent/JPS57121253A/ja active Granted
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6054455A (ja) * | 1983-09-05 | 1985-03-28 | Mitsubishi Electric Corp | 半導体装置の製造方法 |
JPH0230181B2 (ja) * | 1983-09-05 | 1990-07-04 | Mitsubishi Electric Corp | |
JPS63221649A (ja) * | 1987-03-10 | 1988-09-14 | Nec Corp | 半導体装置の配線構造 |
Also Published As
Publication number | Publication date |
---|---|
JPS6248898B2 (ja) | 1987-10-16 |
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