JPS5768005A - Inductance for josephson integrated circuit - Google Patents

Inductance for josephson integrated circuit

Info

Publication number
JPS5768005A
JPS5768005A JP55143359A JP14335980A JPS5768005A JP S5768005 A JPS5768005 A JP S5768005A JP 55143359 A JP55143359 A JP 55143359A JP 14335980 A JP14335980 A JP 14335980A JP S5768005 A JPS5768005 A JP S5768005A
Authority
JP
Japan
Prior art keywords
layer
oxidized
inductance
integrated circuit
hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP55143359A
Other languages
Japanese (ja)
Other versions
JPH0221149B2 (en
Inventor
Hiroyuki Abe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP55143359A priority Critical patent/JPS5768005A/en
Publication of JPS5768005A publication Critical patent/JPS5768005A/en
Publication of JPH0221149B2 publication Critical patent/JPH0221149B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F27/00—Details of transformers or inductances, in general

Abstract

PURPOSE:To obtain an element for a Josephson integrated circuit having large inductance per unit length without disconnection by forming the inductance used as the element of the Josephson integrated circuit on an insulator layer filled in the recess of a grounded surface. CONSTITUTION:A niobium layer 42 is accomulated as a superconductor material on a substrate 48, the surface is oxidized to form an oxidized niobium layer 43, and a mask material layer 44 having a hole for forming a recess thereon is formed of ZnO or photoresit or the like. Subsequently, the layer 43 exposed in the opening and then the layer 42 are removed by ion etching or the like to the halves of the thickness, and the surface of the exposed layer 42 is oxidized to form an oxidized niobium layer 45 to bury the bottom of the hole. Thereafter, an insulator layer 46 is covered on the overall surface including the hole, the layer 44 is removed together with the layer 46 covered thereon, and a next superconductor layer 48 made of silicon monoxide layer 47 and lead alloy is laminated as an inductance. Then, a Josephson junction is formed by an ordinary method.
JP55143359A 1980-10-14 1980-10-14 Inductance for josephson integrated circuit Granted JPS5768005A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55143359A JPS5768005A (en) 1980-10-14 1980-10-14 Inductance for josephson integrated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55143359A JPS5768005A (en) 1980-10-14 1980-10-14 Inductance for josephson integrated circuit

Publications (2)

Publication Number Publication Date
JPS5768005A true JPS5768005A (en) 1982-04-26
JPH0221149B2 JPH0221149B2 (en) 1990-05-11

Family

ID=15336944

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55143359A Granted JPS5768005A (en) 1980-10-14 1980-10-14 Inductance for josephson integrated circuit

Country Status (1)

Country Link
JP (1) JPS5768005A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6237910A (en) * 1985-08-13 1987-02-18 Agency Of Ind Science & Technol Superconducting inductor

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5031356A (en) * 1973-07-25 1975-03-27
JPS5472452A (en) * 1977-11-21 1979-06-09 Nippon Electric Co Preparation of electronic parts
JPS5591103A (en) * 1978-12-28 1980-07-10 Tdk Corp Laminated inductor

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5031356A (en) * 1973-07-25 1975-03-27
JPS5472452A (en) * 1977-11-21 1979-06-09 Nippon Electric Co Preparation of electronic parts
JPS5591103A (en) * 1978-12-28 1980-07-10 Tdk Corp Laminated inductor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6237910A (en) * 1985-08-13 1987-02-18 Agency Of Ind Science & Technol Superconducting inductor

Also Published As

Publication number Publication date
JPH0221149B2 (en) 1990-05-11

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