JPS5650589A - Manufacture of josephson junction - Google Patents

Manufacture of josephson junction

Info

Publication number
JPS5650589A
JPS5650589A JP12621679A JP12621679A JPS5650589A JP S5650589 A JPS5650589 A JP S5650589A JP 12621679 A JP12621679 A JP 12621679A JP 12621679 A JP12621679 A JP 12621679A JP S5650589 A JPS5650589 A JP S5650589A
Authority
JP
Japan
Prior art keywords
junction
superconductive material
josephson junction
material layer
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12621679A
Other languages
Japanese (ja)
Inventor
Masao Nagatomo
Natsuo Tsubouchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP12621679A priority Critical patent/JPS5650589A/en
Publication of JPS5650589A publication Critical patent/JPS5650589A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0912—Manufacture or treatment of Josephson-effect devices

Abstract

PURPOSE:To improve the integrity of a Josephson junction by longitudinally laminating a superconductive material layer, a junction and a superconductive material layer. CONSTITUTION:A superconductive material layer 3 is formed on a substrate 1 formed with an oxide film 2. Subsequently, an oxidation resistant film 4 such as nitride film or the like is formed on the portion where becomes a Josephson junction by a CVD process and an etching process or the like thereon. Nb except the junction is oxidized, and an oxide layer 5 is formed thereon so that the junction length l of the Nb layer 3 is less than 1mum. Then, the nitride film 4 is etched and removed, and superconductive material layer 6 of Nb or the like is formed on the whole surface thereof. The superconductive material may include any which can be oxidized such as tin. Thus, the layers can be longitudinally laminated, and the integrity of the Josephson junction can be improved.
JP12621679A 1979-09-29 1979-09-29 Manufacture of josephson junction Pending JPS5650589A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12621679A JPS5650589A (en) 1979-09-29 1979-09-29 Manufacture of josephson junction

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12621679A JPS5650589A (en) 1979-09-29 1979-09-29 Manufacture of josephson junction

Publications (1)

Publication Number Publication Date
JPS5650589A true JPS5650589A (en) 1981-05-07

Family

ID=14929601

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12621679A Pending JPS5650589A (en) 1979-09-29 1979-09-29 Manufacture of josephson junction

Country Status (1)

Country Link
JP (1) JPS5650589A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63275191A (en) * 1987-05-06 1988-11-11 Semiconductor Energy Lab Co Ltd Manufacture of superconductive device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63275191A (en) * 1987-05-06 1988-11-11 Semiconductor Energy Lab Co Ltd Manufacture of superconductive device

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