JPS5694651A - Manufacture of material for electronic parts - Google Patents
Manufacture of material for electronic partsInfo
- Publication number
- JPS5694651A JPS5694651A JP17028679A JP17028679A JPS5694651A JP S5694651 A JPS5694651 A JP S5694651A JP 17028679 A JP17028679 A JP 17028679A JP 17028679 A JP17028679 A JP 17028679A JP S5694651 A JPS5694651 A JP S5694651A
- Authority
- JP
- Japan
- Prior art keywords
- titanic
- alcohol
- substrate
- alkoxide
- carboxylic acid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 abstract 5
- 235000019441 ethanol Nutrition 0.000 abstract 4
- 239000000758 substrate Substances 0.000 abstract 4
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 abstract 3
- WFDIJRYMOXRFFG-UHFFFAOYSA-N acetic acid anhydride Natural products CC(=O)OC(C)=O WFDIJRYMOXRFFG-UHFFFAOYSA-N 0.000 abstract 3
- 150000004703 alkoxides Chemical class 0.000 abstract 3
- 150000001732 carboxylic acid derivatives Chemical class 0.000 abstract 3
- 239000011248 coating agent Substances 0.000 abstract 3
- 238000000576 coating method Methods 0.000 abstract 3
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 abstract 2
- 239000000919 ceramic Substances 0.000 abstract 2
- 239000011521 glass Substances 0.000 abstract 2
- 125000003903 2-propenyl group Chemical group [H]C([*])([H])C([H])=C([H])[H] 0.000 abstract 1
- 229960000583 acetic acid Drugs 0.000 abstract 1
- 125000000217 alkyl group Chemical group 0.000 abstract 1
- 229910052732 germanium Inorganic materials 0.000 abstract 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 abstract 1
- 239000012362 glacial acetic acid Substances 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
- 239000000126 substance Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemically Coating (AREA)
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
- Formation Of Insulating Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17028679A JPS5694651A (en) | 1979-12-28 | 1979-12-28 | Manufacture of material for electronic parts |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17028679A JPS5694651A (en) | 1979-12-28 | 1979-12-28 | Manufacture of material for electronic parts |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5694651A true JPS5694651A (en) | 1981-07-31 |
| JPS6366903B2 JPS6366903B2 (enrdf_load_stackoverflow) | 1988-12-22 |
Family
ID=15902124
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17028679A Granted JPS5694651A (en) | 1979-12-28 | 1979-12-28 | Manufacture of material for electronic parts |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5694651A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6325930A (ja) * | 1986-07-18 | 1988-02-03 | Toshiba Components Kk | 半導体装置 |
| JP2016532739A (ja) * | 2013-06-28 | 2016-10-20 | アーゼッド・エレクトロニック・マテリアルズ（ルクセンブルグ）ソシエテ・ア・レスポンサビリテ・リミテ | 可溶性金属酸化物カルボキシレートのスピンオン組成物及びそれらの使用方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5314699A (en) * | 1976-07-23 | 1978-02-09 | Pechiney Aluminium | Alumina mass having good mechanical strength and method of making same |
| JPS55167130A (en) * | 1979-06-12 | 1980-12-26 | Hitachi Ltd | Metal oxide thin film forming method |
-
1979
- 1979-12-28 JP JP17028679A patent/JPS5694651A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5314699A (en) * | 1976-07-23 | 1978-02-09 | Pechiney Aluminium | Alumina mass having good mechanical strength and method of making same |
| JPS55167130A (en) * | 1979-06-12 | 1980-12-26 | Hitachi Ltd | Metal oxide thin film forming method |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6325930A (ja) * | 1986-07-18 | 1988-02-03 | Toshiba Components Kk | 半導体装置 |
| JP2016532739A (ja) * | 2013-06-28 | 2016-10-20 | アーゼッド・エレクトロニック・マテリアルズ（ルクセンブルグ）ソシエテ・ア・レスポンサビリテ・リミテ | 可溶性金属酸化物カルボキシレートのスピンオン組成物及びそれらの使用方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6366903B2 (enrdf_load_stackoverflow) | 1988-12-22 |
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