JPS55167130A - Metal oxide thin film forming method - Google Patents
Metal oxide thin film forming methodInfo
- Publication number
- JPS55167130A JPS55167130A JP7298779A JP7298779A JPS55167130A JP S55167130 A JPS55167130 A JP S55167130A JP 7298779 A JP7298779 A JP 7298779A JP 7298779 A JP7298779 A JP 7298779A JP S55167130 A JPS55167130 A JP S55167130A
- Authority
- JP
- Japan
- Prior art keywords
- soln
- film
- metal oxide
- thin film
- oxide thin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Chemically Coating (AREA)
- Inorganic Insulating Materials (AREA)
- Manufacturing Of Electric Cables (AREA)
Abstract
PURPOSE: To enable formation of a homogeneous metal oxide film from a soln. of a metal alcoholate in an org. solvent by adding a stabilizing agent such as carboxylic acid to the soln., coating the resulting soln. onto a substrate to form a film, and heating the film.
CONSTITUTION: To a soln. of a metal alcoholate such as titanium tetraethoxide in an org. solvent is added at least one kind of a compound as a stabilizing agent selected from a group consisting of carboxylic acids, phenol and phenol derivatives, stabilizing the soln. to water and preventing precipitation. The resulting soln. is coated onto a glass substrate form a film, and then film is heated at about 350W 700°C to obtain a homogeneous metal oxide thin film from such a metal alcoholate soln. which was not used industrially since it is hydrolyzed with water and is very unstable.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7298779A JPS55167130A (en) | 1979-06-12 | 1979-06-12 | Metal oxide thin film forming method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7298779A JPS55167130A (en) | 1979-06-12 | 1979-06-12 | Metal oxide thin film forming method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS55167130A true JPS55167130A (en) | 1980-12-26 |
JPS6144950B2 JPS6144950B2 (en) | 1986-10-06 |
Family
ID=13505246
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7298779A Granted JPS55167130A (en) | 1979-06-12 | 1979-06-12 | Metal oxide thin film forming method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS55167130A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5694651A (en) * | 1979-12-28 | 1981-07-31 | Tokyo Denshi Kagaku Kabushiki | Manufacture of material for electronic parts |
JPH1192946A (en) * | 1997-09-19 | 1999-04-06 | Shinto Paint Co Ltd | Forming method of metal oxide film |
US8445118B2 (en) | 2006-07-13 | 2013-05-21 | Central Japan Railway Company | Coating liquid, metal compound film formed by coating liquid, and forming method thereof |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6310950A (en) * | 1986-07-02 | 1988-01-18 | Mitsuo Kikuchi | Abbreviated dial device |
-
1979
- 1979-06-12 JP JP7298779A patent/JPS55167130A/en active Granted
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5694651A (en) * | 1979-12-28 | 1981-07-31 | Tokyo Denshi Kagaku Kabushiki | Manufacture of material for electronic parts |
JPS6366903B2 (en) * | 1979-12-28 | 1988-12-22 | Tokyo Ohka Kogyo Co Ltd | |
JPH1192946A (en) * | 1997-09-19 | 1999-04-06 | Shinto Paint Co Ltd | Forming method of metal oxide film |
US8445118B2 (en) | 2006-07-13 | 2013-05-21 | Central Japan Railway Company | Coating liquid, metal compound film formed by coating liquid, and forming method thereof |
Also Published As
Publication number | Publication date |
---|---|
JPS6144950B2 (en) | 1986-10-06 |
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