JPS5510455A - Production of tantalum oxide film - Google Patents
Production of tantalum oxide filmInfo
- Publication number
- JPS5510455A JPS5510455A JP8336078A JP8336078A JPS5510455A JP S5510455 A JPS5510455 A JP S5510455A JP 8336078 A JP8336078 A JP 8336078A JP 8336078 A JP8336078 A JP 8336078A JP S5510455 A JPS5510455 A JP S5510455A
- Authority
- JP
- Japan
- Prior art keywords
- vol
- tantalum
- solvent
- substrate
- tantalum oxide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 title abstract 2
- 229910001936 tantalum oxide Inorganic materials 0.000 title abstract 2
- 239000000758 substrate Substances 0.000 abstract 4
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 abstract 3
- 239000011248 coating agent Substances 0.000 abstract 3
- 238000000576 coating method Methods 0.000 abstract 3
- 239000002904 solvent Substances 0.000 abstract 3
- 229910052715 tantalum Inorganic materials 0.000 abstract 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 abstract 2
- 150000001735 carboxylic acids Chemical class 0.000 abstract 2
- -1 tantalum alkoxide Chemical class 0.000 abstract 2
- 229960000583 acetic acid Drugs 0.000 abstract 1
- 235000019441 ethanol Nutrition 0.000 abstract 1
- 239000012362 glacial acetic acid Substances 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 230000003287 optical effect Effects 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 abstract 1
- 239000010409 thin film Substances 0.000 abstract 1
Landscapes
- Inorganic Compounds Of Heavy Metals (AREA)
- Light Receiving Elements (AREA)
Abstract
PURPOSE: To produce a tantalum oxide thin film with a desired refractive index in a short time by coating a substrate with a coating compsn. obtd. by mixing tantalum alkoxide and carboxylic acid into a solvent and by heating the coated substrate.
CONSTITUTION: A substrate for a semiconductor material, an optical instrument or the like is coated with a coating compsn. obtd. by mixing 1 vol. of tantalum alkoxide such as tantalum ethylate and below 1 vol. of carboxylic acid such as glacial acetic acid into above 1 vol. of a solvent such as ethyl alcohol. The coated substrate is then heated to evaporate the solvent.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP53083360A JPS5830252B2 (en) | 1978-07-07 | 1978-07-07 | Method for manufacturing tantalum oxide film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP53083360A JPS5830252B2 (en) | 1978-07-07 | 1978-07-07 | Method for manufacturing tantalum oxide film |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5510455A true JPS5510455A (en) | 1980-01-24 |
| JPS5830252B2 JPS5830252B2 (en) | 1983-06-28 |
Family
ID=13800255
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP53083360A Expired JPS5830252B2 (en) | 1978-07-07 | 1978-07-07 | Method for manufacturing tantalum oxide film |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5830252B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5753148A (en) * | 1995-08-30 | 1998-05-19 | Walbro Corporation | Carburetor needle valve adjustment limiter cap apparatus and method of adjusting fuel flow |
| US6180188B1 (en) | 1997-02-10 | 2001-01-30 | Commissariat A L'energie Atomique | Method for preparing a multilayer optical material with crosslinking-densifying by ultraviolet radiation |
| US6387517B1 (en) | 1997-02-10 | 2002-05-14 | Commissariat A L'energie Atomique | Inorganic polymer material with tantalic acid anhydride base, in particular with high refractive index, mechanically abrasionproof, method of manufacture, optical materials comprising such material |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61136438U (en) * | 1985-02-15 | 1986-08-25 |
-
1978
- 1978-07-07 JP JP53083360A patent/JPS5830252B2/en not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5753148A (en) * | 1995-08-30 | 1998-05-19 | Walbro Corporation | Carburetor needle valve adjustment limiter cap apparatus and method of adjusting fuel flow |
| US6180188B1 (en) | 1997-02-10 | 2001-01-30 | Commissariat A L'energie Atomique | Method for preparing a multilayer optical material with crosslinking-densifying by ultraviolet radiation |
| US6387517B1 (en) | 1997-02-10 | 2002-05-14 | Commissariat A L'energie Atomique | Inorganic polymer material with tantalic acid anhydride base, in particular with high refractive index, mechanically abrasionproof, method of manufacture, optical materials comprising such material |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5830252B2 (en) | 1983-06-28 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS5534258A (en) | Coating solution for forming silica film | |
| JPS57111257A (en) | Preparation of glass fiber for light-piping | |
| JPS565356A (en) | Formation of transparent conductive film | |
| JPS5551737A (en) | Transparent, electrically conductive film forming coating solution and film forming method | |
| JPS543129A (en) | Coating powder composition | |
| JPS5565239A (en) | Method of forming film of titanium oxide on plastic base plate | |
| JPS5515978A (en) | Production of titanium oxide film | |
| JPS559484A (en) | Coating film for phtoelectric transducer | |
| JPS55149919A (en) | Electrode substrate | |
| JPS5583272A (en) | Solar battery unit and method of manufacturing the same | |
| JPS551109A (en) | Manufacture of semiconductor device | |
| JPS5525470A (en) | Titanium-based coating composition | |
| JPS55167130A (en) | Metal oxide thin film forming method | |
| JPS5694651A (en) | Manufacture of material for electronic parts | |
| JPS53146995A (en) | Production of titanium oxide film | |
| JPS5499449A (en) | Roduction of liquid crystal display element | |
| JPS55135819A (en) | Production of liquid crystal display device | |
| JPS5774366A (en) | Cerium oxide film-forming coating solution and method of forming film thereof | |
| JPS5447741A (en) | Mehod of powder-coating porous material | |
| JPS5684342A (en) | Manufacture of glass product | |
| JPS5399230A (en) | Unsaturated polyester resin coating for double-head gun spray | |
| JPS5274624A (en) | Waterproof coating composition | |
| JPS5670526A (en) | Orientation processing agent for liquid-crystal display panel | |
| JPS577842A (en) | Manufacture of waterproof glass fiber | |
| JPS55102633A (en) | Manufacturing of polar polymer film |