JPS57209851A - Composition for forming metal oxide film, and method for forming metal oxide film - Google Patents

Composition for forming metal oxide film, and method for forming metal oxide film

Info

Publication number
JPS57209851A
JPS57209851A JP9233281A JP9233281A JPS57209851A JP S57209851 A JPS57209851 A JP S57209851A JP 9233281 A JP9233281 A JP 9233281A JP 9233281 A JP9233281 A JP 9233281A JP S57209851 A JPS57209851 A JP S57209851A
Authority
JP
Japan
Prior art keywords
oxide film
metal oxide
forming metal
polymer
group
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9233281A
Other languages
Japanese (ja)
Inventor
Haruhiko Matsuyama
Mitsuo Nakatani
Fumio Kataoka
Fusaji Shoji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP9233281A priority Critical patent/JPS57209851A/en
Publication of JPS57209851A publication Critical patent/JPS57209851A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/42—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating of an organic material and at least one non-metal coating

Abstract

PURPOSE: To form a metal oxide film having a fine pattern, without using etching process, by coating a substrate with a composition composed of a metal- coordinating polymer, a photo-sensitive additive, a metal salt and a solvent, patterning the coating film directly, and baking the film.
CONSTITUTION: A substrate is coated with a composition composed of (A) a polymer containing coordination groups such as COOR1 (R1 is H or ≤5C alkyl), SO3H, etc., e.g. maleic anhydride polymer, (B) a photo-sensitive additive having an amino group and an aromatic azide group or an amino group and an aromatic sulfonyl azide group in the molecule, e.g. 2-(N,N-dimethylamino)ethyl p- azidobenzoate, (C) a metal salt which can be coordinated to the coordination group of the polymer, e.g. indium nitrate, and (D) a solvent such as ethyl cellosolve. The coating film is patterned by autolithography, and baked at ≥400°C to form the pattern of the metal oxide film.
COPYRIGHT: (C)1982,JPO&Japio
JP9233281A 1981-06-17 1981-06-17 Composition for forming metal oxide film, and method for forming metal oxide film Pending JPS57209851A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9233281A JPS57209851A (en) 1981-06-17 1981-06-17 Composition for forming metal oxide film, and method for forming metal oxide film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9233281A JPS57209851A (en) 1981-06-17 1981-06-17 Composition for forming metal oxide film, and method for forming metal oxide film

Publications (1)

Publication Number Publication Date
JPS57209851A true JPS57209851A (en) 1982-12-23

Family

ID=14051430

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9233281A Pending JPS57209851A (en) 1981-06-17 1981-06-17 Composition for forming metal oxide film, and method for forming metal oxide film

Country Status (1)

Country Link
JP (1) JPS57209851A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8197786B2 (en) 2006-09-07 2012-06-12 Samsung Sdi Co., Ltd. Porous carbon material and method of manufacturing the same
US8617510B2 (en) * 2006-03-29 2013-12-31 Samsung Sdi Co., Ltd. Porous metal oxide and method of preparing the same

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8617510B2 (en) * 2006-03-29 2013-12-31 Samsung Sdi Co., Ltd. Porous metal oxide and method of preparing the same
US8197786B2 (en) 2006-09-07 2012-06-12 Samsung Sdi Co., Ltd. Porous carbon material and method of manufacturing the same

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