JPS5682539A - Electron gun - Google Patents

Electron gun

Info

Publication number
JPS5682539A
JPS5682539A JP15798379A JP15798379A JPS5682539A JP S5682539 A JPS5682539 A JP S5682539A JP 15798379 A JP15798379 A JP 15798379A JP 15798379 A JP15798379 A JP 15798379A JP S5682539 A JPS5682539 A JP S5682539A
Authority
JP
Japan
Prior art keywords
chip
tip
face
area
anisotropy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15798379A
Other languages
English (en)
Other versions
JPH0131256B2 (ja
Inventor
Isao Sasaki
Tadahiro Takigawa
Kakuki Motoyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP15798379A priority Critical patent/JPS5682539A/ja
Publication of JPS5682539A publication Critical patent/JPS5682539A/ja
Publication of JPH0131256B2 publication Critical patent/JPH0131256B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/13—Solid thermionic cathodes
    • H01J1/15—Cathodes heated directly by an electric current
    • H01J1/16—Cathodes heated directly by an electric current characterised by the shape

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP15798379A 1979-12-07 1979-12-07 Electron gun Granted JPS5682539A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15798379A JPS5682539A (en) 1979-12-07 1979-12-07 Electron gun

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15798379A JPS5682539A (en) 1979-12-07 1979-12-07 Electron gun

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2128300A Division JPH0719744B2 (ja) 1990-05-18 1990-05-18 電子ビーム露光方法

Publications (2)

Publication Number Publication Date
JPS5682539A true JPS5682539A (en) 1981-07-06
JPH0131256B2 JPH0131256B2 (ja) 1989-06-23

Family

ID=15661673

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15798379A Granted JPS5682539A (en) 1979-12-07 1979-12-07 Electron gun

Country Status (1)

Country Link
JP (1) JPS5682539A (ja)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58223247A (ja) * 1982-06-22 1983-12-24 Toshiba Corp 電子銃の輝度設定方法
JPS5912534A (ja) * 1982-07-13 1984-01-23 Fujitsu Ltd 熱電子放出陰極
JPS5960952A (ja) * 1982-09-30 1984-04-07 Fujitsu Ltd 電子ビ−ム露光装置用電子銃
JPH03114215A (ja) * 1990-05-18 1991-05-15 Toshiba Corp 電子ビーム露光方法
WO2004073010A1 (ja) * 2003-02-17 2004-08-26 Denki Kagaku Kogyo Kabushiki Kaisha 電子銃
WO2007148507A1 (ja) * 2006-06-19 2007-12-27 Denki Kagaku Kogyo Kabushiki Kaisha 電子源

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5588233A (en) * 1978-12-26 1980-07-03 Denki Kagaku Kogyo Kk Hexaboride single crystal cathode

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5588233A (en) * 1978-12-26 1980-07-03 Denki Kagaku Kogyo Kk Hexaboride single crystal cathode

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58223247A (ja) * 1982-06-22 1983-12-24 Toshiba Corp 電子銃の輝度設定方法
JPS6335064B2 (ja) * 1982-06-22 1988-07-13 Tokyo Shibaura Electric Co
JPS5912534A (ja) * 1982-07-13 1984-01-23 Fujitsu Ltd 熱電子放出陰極
JPH0429173B2 (ja) * 1982-07-13 1992-05-18
JPS5960952A (ja) * 1982-09-30 1984-04-07 Fujitsu Ltd 電子ビ−ム露光装置用電子銃
JPH03114215A (ja) * 1990-05-18 1991-05-15 Toshiba Corp 電子ビーム露光方法
WO2004073010A1 (ja) * 2003-02-17 2004-08-26 Denki Kagaku Kogyo Kabushiki Kaisha 電子銃
JPWO2004073010A1 (ja) * 2003-02-17 2006-06-01 電気化学工業株式会社 電子銃
WO2007148507A1 (ja) * 2006-06-19 2007-12-27 Denki Kagaku Kogyo Kabushiki Kaisha 電子源

Also Published As

Publication number Publication date
JPH0131256B2 (ja) 1989-06-23

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