JPS5680912A - Piezoelectric element for surface wave filter - Google Patents

Piezoelectric element for surface wave filter

Info

Publication number
JPS5680912A
JPS5680912A JP15744779A JP15744779A JPS5680912A JP S5680912 A JPS5680912 A JP S5680912A JP 15744779 A JP15744779 A JP 15744779A JP 15744779 A JP15744779 A JP 15744779A JP S5680912 A JPS5680912 A JP S5680912A
Authority
JP
Japan
Prior art keywords
vapor
electrodes
wafer
adhesive strength
main surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15744779A
Other languages
Japanese (ja)
Other versions
JPS6223486B2 (en
Inventor
Takuji Yamada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP15744779A priority Critical patent/JPS5680912A/en
Publication of JPS5680912A publication Critical patent/JPS5680912A/en
Publication of JPS6223486B2 publication Critical patent/JPS6223486B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)

Abstract

PURPOSE:To improve adhesive strength between electrodes and a substrate by forming a pattern group of input electrodes and output electrodes by vapor-depositing Al on one main surface of a piezoelectric substance wafer and then by carrying out a heat treatment. CONSTITUTION:One main surface of a wafer of 62mm.phi, for example, made of LiTaO3 is mirror-finished and on this mirror surface, Al is vapor-deposited to form a thin vapor-deposition film. Next, pattern groups of prescribed input electrodes 12' and output electrodes 13' are formed by photoetching. Such a wafer is thermally processed in a nitrogen atmosphere at 300-400 deg.C for 30-60min, for example. Consequently, grown seeds of about 0.7-1.5mumphi are formed on surfaces of input electrodes 12' and output electrodes 13' made of the Al-vapor-deposition films. Thus, the adhesive strength between the Al-vapor-deposition films and piezoelectric substrate 11 is improved.
JP15744779A 1979-12-06 1979-12-06 Piezoelectric element for surface wave filter Granted JPS5680912A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15744779A JPS5680912A (en) 1979-12-06 1979-12-06 Piezoelectric element for surface wave filter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15744779A JPS5680912A (en) 1979-12-06 1979-12-06 Piezoelectric element for surface wave filter

Publications (2)

Publication Number Publication Date
JPS5680912A true JPS5680912A (en) 1981-07-02
JPS6223486B2 JPS6223486B2 (en) 1987-05-23

Family

ID=15649850

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15744779A Granted JPS5680912A (en) 1979-12-06 1979-12-06 Piezoelectric element for surface wave filter

Country Status (1)

Country Link
JP (1) JPS5680912A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52138442A (en) * 1976-05-17 1977-11-18 Hitachi Ltd Method of forming metal membrane

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52138442A (en) * 1976-05-17 1977-11-18 Hitachi Ltd Method of forming metal membrane

Also Published As

Publication number Publication date
JPS6223486B2 (en) 1987-05-23

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