JPS57162819A - Surface acoustic wave filter - Google Patents
Surface acoustic wave filterInfo
- Publication number
- JPS57162819A JPS57162819A JP4715481A JP4715481A JPS57162819A JP S57162819 A JPS57162819 A JP S57162819A JP 4715481 A JP4715481 A JP 4715481A JP 4715481 A JP4715481 A JP 4715481A JP S57162819 A JPS57162819 A JP S57162819A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- electrode
- vapor deposited
- deposited film
- etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Abstract
PURPOSE:To reduce the production of defects and to improve the yield, by covering the electrode side surface of input and output electrodes formed in comb shape on the surface of a piezoelectric substrate and the surface of exposed substrate between the electrodes with SiO2 particles. CONSTITUTION:On a substrate 11 made of LiTaO3, vapor deposited film is formed by using solid solution of Al and Si to form input and output electrodes in comb shape through etching. On a substrate exposed surface 11A between side surfaces 12A and 12B of each electrode 12 and the electrode 12, Si is left as SiO2 particles by etching liquid at etching of the vapor deposited film and covered on the whole surface. Thus, the SiO2 particles cover the surface and the Si is included in the vapor deposited film, allowing to form the film with good adaptability with the substrate 11 at low temperatures and to obtain the excellent electrode 12.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4715481A JPS57162819A (en) | 1981-04-01 | 1981-04-01 | Surface acoustic wave filter |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4715481A JPS57162819A (en) | 1981-04-01 | 1981-04-01 | Surface acoustic wave filter |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS57162819A true JPS57162819A (en) | 1982-10-06 |
Family
ID=12767164
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4715481A Pending JPS57162819A (en) | 1981-04-01 | 1981-04-01 | Surface acoustic wave filter |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57162819A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60244108A (en) * | 1984-05-18 | 1985-12-04 | Alps Electric Co Ltd | Surface acoustic wave element |
EP0394480A1 (en) * | 1988-10-16 | 1990-10-31 | YAMANOUCHI, Kazuhiko | Structure of surface acoustic wave transducer having small electrode gaps and method of producing the same |
WO2010100967A1 (en) * | 2009-03-02 | 2010-09-10 | 株式会社村田製作所 | Surface acoustic wave device |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5258342A (en) * | 1975-11-10 | 1977-05-13 | Toshiba Corp | Surface wave filter |
-
1981
- 1981-04-01 JP JP4715481A patent/JPS57162819A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5258342A (en) * | 1975-11-10 | 1977-05-13 | Toshiba Corp | Surface wave filter |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60244108A (en) * | 1984-05-18 | 1985-12-04 | Alps Electric Co Ltd | Surface acoustic wave element |
EP0394480A1 (en) * | 1988-10-16 | 1990-10-31 | YAMANOUCHI, Kazuhiko | Structure of surface acoustic wave transducer having small electrode gaps and method of producing the same |
WO2010100967A1 (en) * | 2009-03-02 | 2010-09-10 | 株式会社村田製作所 | Surface acoustic wave device |
JP5321678B2 (en) * | 2009-03-02 | 2013-10-23 | 株式会社村田製作所 | Surface acoustic wave device |
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