JPS57162819A - Surface acoustic wave filter - Google Patents

Surface acoustic wave filter

Info

Publication number
JPS57162819A
JPS57162819A JP4715481A JP4715481A JPS57162819A JP S57162819 A JPS57162819 A JP S57162819A JP 4715481 A JP4715481 A JP 4715481A JP 4715481 A JP4715481 A JP 4715481A JP S57162819 A JPS57162819 A JP S57162819A
Authority
JP
Japan
Prior art keywords
substrate
electrode
vapor deposited
deposited film
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4715481A
Other languages
Japanese (ja)
Inventor
Takuji Yamada
Shigeyuki Kita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP4715481A priority Critical patent/JPS57162819A/en
Publication of JPS57162819A publication Critical patent/JPS57162819A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)

Abstract

PURPOSE:To reduce the production of defects and to improve the yield, by covering the electrode side surface of input and output electrodes formed in comb shape on the surface of a piezoelectric substrate and the surface of exposed substrate between the electrodes with SiO2 particles. CONSTITUTION:On a substrate 11 made of LiTaO3, vapor deposited film is formed by using solid solution of Al and Si to form input and output electrodes in comb shape through etching. On a substrate exposed surface 11A between side surfaces 12A and 12B of each electrode 12 and the electrode 12, Si is left as SiO2 particles by etching liquid at etching of the vapor deposited film and covered on the whole surface. Thus, the SiO2 particles cover the surface and the Si is included in the vapor deposited film, allowing to form the film with good adaptability with the substrate 11 at low temperatures and to obtain the excellent electrode 12.
JP4715481A 1981-04-01 1981-04-01 Surface acoustic wave filter Pending JPS57162819A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4715481A JPS57162819A (en) 1981-04-01 1981-04-01 Surface acoustic wave filter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4715481A JPS57162819A (en) 1981-04-01 1981-04-01 Surface acoustic wave filter

Publications (1)

Publication Number Publication Date
JPS57162819A true JPS57162819A (en) 1982-10-06

Family

ID=12767164

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4715481A Pending JPS57162819A (en) 1981-04-01 1981-04-01 Surface acoustic wave filter

Country Status (1)

Country Link
JP (1) JPS57162819A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60244108A (en) * 1984-05-18 1985-12-04 Alps Electric Co Ltd Surface acoustic wave element
EP0394480A1 (en) * 1988-10-16 1990-10-31 YAMANOUCHI, Kazuhiko Structure of surface acoustic wave transducer having small electrode gaps and method of producing the same
WO2010100967A1 (en) * 2009-03-02 2010-09-10 株式会社村田製作所 Surface acoustic wave device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5258342A (en) * 1975-11-10 1977-05-13 Toshiba Corp Surface wave filter

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5258342A (en) * 1975-11-10 1977-05-13 Toshiba Corp Surface wave filter

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60244108A (en) * 1984-05-18 1985-12-04 Alps Electric Co Ltd Surface acoustic wave element
EP0394480A1 (en) * 1988-10-16 1990-10-31 YAMANOUCHI, Kazuhiko Structure of surface acoustic wave transducer having small electrode gaps and method of producing the same
WO2010100967A1 (en) * 2009-03-02 2010-09-10 株式会社村田製作所 Surface acoustic wave device
JP5321678B2 (en) * 2009-03-02 2013-10-23 株式会社村田製作所 Surface acoustic wave device

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