JPS54156455A - Surface acoustic wave element and its trimming method - Google Patents

Surface acoustic wave element and its trimming method

Info

Publication number
JPS54156455A
JPS54156455A JP6429378A JP6429378A JPS54156455A JP S54156455 A JPS54156455 A JP S54156455A JP 6429378 A JP6429378 A JP 6429378A JP 6429378 A JP6429378 A JP 6429378A JP S54156455 A JPS54156455 A JP S54156455A
Authority
JP
Grant status
Application
Patent type
Prior art keywords
surface
electrode
etching
acoustic wave
wave element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6429378A
Other versions
JPS6141446B2 (en )
Inventor
Yasuo Ehata
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date

Links

Classifications

    • HELECTRICITY
    • H03BASIC ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/08Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
    • H03H3/10Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves for obtaining desired frequency or temperature coefficient

Abstract

PURPOSE:To enable to adjust the center frequency of the surface acoustic wave element lower, by providing the inter-digital electrode on the surface of the piezoelectric substrate and providing the etching surface on the surface of piezoelectric substance at the surface wave propagation path by this electrode. CONSTITUTION:The surface acoustic wave element is constituted by forming the inter-digital electrode 4 on the surface of the piezoelectric substrate 1. Etching is made on the substrate surface 5 exposed between electrode chips 4, and the center frequency of element can be adjusted lower by changing the amount of etching. By combinating it with the means in which the surface 6 of the electrode 4 is etched to adjust higher frequency, the frequency can be adjusted in extremely accurate method. It is effective to use dry etching for the selctive etching between the electrode metal 4 and the substrate 1.
JP6429378A 1978-05-31 1978-05-31 Expired JPS6141446B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6429378A JPS6141446B2 (en) 1978-05-31 1978-05-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6429378A JPS6141446B2 (en) 1978-05-31 1978-05-31

Publications (2)

Publication Number Publication Date
JPS54156455A true true JPS54156455A (en) 1979-12-10
JPS6141446B2 JPS6141446B2 (en) 1986-09-16

Family

ID=13254036

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6429378A Expired JPS6141446B2 (en) 1978-05-31 1978-05-31

Country Status (1)

Country Link
JP (1) JPS6141446B2 (en)

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6120410A (en) * 1984-07-07 1986-01-29 Nec Kansai Ltd Manufacture of surface acoustic wave device
JPS63151103A (en) * 1986-12-15 1988-06-23 Nippon Dempa Kogyo Co Ltd Method and device for adjusting frequency of piezoelectric vibrator
JPS63140719U (en) * 1987-03-06 1988-09-16
JP2002043880A (en) * 2000-07-26 2002-02-08 Murata Mfg Co Ltd Frequency control method for surface acoustic wave element
JP2010233203A (en) * 2009-02-27 2010-10-14 Seiko Epson Corp Surface acoustic wave resonator and surface acoustic wave oscillator
JP2011041287A (en) * 2009-02-27 2011-02-24 Seiko Epson Corp Surface acoustic wave resonator and surface acoustic wave oscillator
US8063534B2 (en) 2008-02-20 2011-11-22 Seiko Epson Corporation Surface acoustic wave device and surface acoustic wave oscillator
WO2013081026A1 (en) * 2011-12-01 2013-06-06 株式会社村田製作所 Surface acoustic wave device
US8471434B2 (en) 2010-08-26 2013-06-25 Seiko Epson Corporation Surface acoustic wave device, surface acoustic wave oscillator, and electronic apparatus
US8476984B2 (en) 2010-12-07 2013-07-02 Seiko Epson Corporation Vibration device, oscillator, and electronic apparatus
US8598766B2 (en) 2010-12-03 2013-12-03 Seiko Epson Corporation Surface acoustic wave resonator, surface acoustic wave oscillator, and electronic apparatus
US8692439B2 (en) 2010-08-26 2014-04-08 Seiko Epson Corporation Surface acoustic wave resonator, surface acoustic wave oscillator, and electronic device
US8928432B2 (en) 2010-08-26 2015-01-06 Seiko Epson Corporation Surface acoustic wave resonator, surface acoustic wave oscillator, and electronic apparatus
US9048806B2 (en) 2010-09-09 2015-06-02 Seiko Epson Corporation Surface acoustic wave device, electronic apparatus, and sensor apparatus
US9088263B2 (en) 2010-06-17 2015-07-21 Seiko Epson Corporation Surface acoustic wave resonator, surface acoustic wave oscillator, and electronic apparatus

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4543565B2 (en) * 2001-03-07 2010-09-15 株式会社村田製作所 Frequency adjustment method of a surface acoustic wave device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53118338A (en) * 1977-03-25 1978-10-16 Nippon Telegr & Teleph Corp <Ntt> Active frequency adjustment method for elastic surface wave circuit

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53118338A (en) * 1977-03-25 1978-10-16 Nippon Telegr & Teleph Corp <Ntt> Active frequency adjustment method for elastic surface wave circuit

Cited By (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0528004B2 (en) * 1984-07-07 1993-04-23 Kansai Nippon Electric
JPS6120410A (en) * 1984-07-07 1986-01-29 Nec Kansai Ltd Manufacture of surface acoustic wave device
JPS63151103A (en) * 1986-12-15 1988-06-23 Nippon Dempa Kogyo Co Ltd Method and device for adjusting frequency of piezoelectric vibrator
JPS63140719U (en) * 1987-03-06 1988-09-16
JP2002043880A (en) * 2000-07-26 2002-02-08 Murata Mfg Co Ltd Frequency control method for surface acoustic wave element
US8063534B2 (en) 2008-02-20 2011-11-22 Seiko Epson Corporation Surface acoustic wave device and surface acoustic wave oscillator
US8237326B2 (en) 2008-02-20 2012-08-07 Seiko Epson Corporation Surface acoustic wave device and surface acoustic wave oscillator
US8084918B2 (en) 2008-02-20 2011-12-27 Seiko Epson Corporation Surface acoustic wave device and surface acoustic wave oscillator
US8502625B2 (en) 2009-02-27 2013-08-06 Seiko Epson Corporation Surface acoustic wave resonator and surface acoustic wave oscillator
JP4645923B2 (en) * 2009-02-27 2011-03-09 セイコーエプソン株式会社 Surface acoustic wave resonators, and the surface acoustic wave oscillator
JP2011041287A (en) * 2009-02-27 2011-02-24 Seiko Epson Corp Surface acoustic wave resonator and surface acoustic wave oscillator
US8305162B2 (en) 2009-02-27 2012-11-06 Seiko Epson Corporation Surface acoustic wave resonator and surface acoustic wave oscillator
US8952596B2 (en) 2009-02-27 2015-02-10 Seiko Epson Corporation Surface acoustic wave resonator, surface acoustic wave oscillator, and electronic instrument
JP2010233203A (en) * 2009-02-27 2010-10-14 Seiko Epson Corp Surface acoustic wave resonator and surface acoustic wave oscillator
US8933612B2 (en) 2009-02-27 2015-01-13 Seiko Epson Corporation Surface acoustic wave resonator, surface acoustic wave oscillator, and electronic instrument
US9762207B2 (en) 2009-02-27 2017-09-12 Seiko Epson Corporation Surface acoustic wave resonator, surface acoustic wave oscillator, and electronic instrument
US9088263B2 (en) 2010-06-17 2015-07-21 Seiko Epson Corporation Surface acoustic wave resonator, surface acoustic wave oscillator, and electronic apparatus
US9537464B2 (en) 2010-06-17 2017-01-03 Seiko Epson Corporation Surface acoustic wave resonator, surface acoustic wave oscillator, and electronic apparatus
US8692439B2 (en) 2010-08-26 2014-04-08 Seiko Epson Corporation Surface acoustic wave resonator, surface acoustic wave oscillator, and electronic device
US8471434B2 (en) 2010-08-26 2013-06-25 Seiko Epson Corporation Surface acoustic wave device, surface acoustic wave oscillator, and electronic apparatus
US8928432B2 (en) 2010-08-26 2015-01-06 Seiko Epson Corporation Surface acoustic wave resonator, surface acoustic wave oscillator, and electronic apparatus
US9048806B2 (en) 2010-09-09 2015-06-02 Seiko Epson Corporation Surface acoustic wave device, electronic apparatus, and sensor apparatus
US8598766B2 (en) 2010-12-03 2013-12-03 Seiko Epson Corporation Surface acoustic wave resonator, surface acoustic wave oscillator, and electronic apparatus
US8791621B2 (en) 2010-12-03 2014-07-29 Seiko Epson Corporation Surface acoustic wave resonator, surface acoustic wave oscillator, and electronic apparatus
US8476984B2 (en) 2010-12-07 2013-07-02 Seiko Epson Corporation Vibration device, oscillator, and electronic apparatus
WO2013081026A1 (en) * 2011-12-01 2013-06-06 株式会社村田製作所 Surface acoustic wave device
JPWO2013081026A1 (en) * 2011-12-01 2015-04-27 株式会社村田製作所 The surface acoustic wave device

Also Published As

Publication number Publication date Type
JPS6141446B2 (en) 1986-09-16 grant

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