JPS6428374A - Method for selectively growing tungsten - Google Patents
Method for selectively growing tungstenInfo
- Publication number
- JPS6428374A JPS6428374A JP18258587A JP18258587A JPS6428374A JP S6428374 A JPS6428374 A JP S6428374A JP 18258587 A JP18258587 A JP 18258587A JP 18258587 A JP18258587 A JP 18258587A JP S6428374 A JPS6428374 A JP S6428374A
- Authority
- JP
- Japan
- Prior art keywords
- tungsten
- oxide film
- silicon oxide
- substrate
- selectively growing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Chemical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
Abstract
PURPOSE:To grow tungsten only on a prescribed region of the surface of a substrate by selectively masking the surface of the substrate with a silicon oxide film contg. phosphorus at high concn. and by growing tungsten by a chemical vapor growth method. CONSTITUTION:The surface of a substrate is selectively coated with a silicon oxide film contg. phosphorus at high concn. so that tungsten grains are not produced on the silicon oxide film. Tungsten is then grown by a chemical vapor growth method. Thus, tungsten is grown only on a prescribed region not masked with the silicon oxide film.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62182585A JP2537887B2 (en) | 1987-07-22 | 1987-07-22 | Selective growth method for tungsten |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62182585A JP2537887B2 (en) | 1987-07-22 | 1987-07-22 | Selective growth method for tungsten |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6428374A true JPS6428374A (en) | 1989-01-30 |
JP2537887B2 JP2537887B2 (en) | 1996-09-25 |
Family
ID=16120854
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62182585A Expired - Fee Related JP2537887B2 (en) | 1987-07-22 | 1987-07-22 | Selective growth method for tungsten |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2537887B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6196615B1 (en) | 1990-10-23 | 2001-03-06 | Tokai Kogyo Kabushiki Kaisha | Automobile windshield molding and the method of producing the same |
USRE37737E1 (en) | 1990-09-06 | 2002-06-11 | Tokai Kogyo Kabushiki Kaisha | Automobile windshield molding and method of producing the same |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6242419A (en) * | 1985-08-19 | 1987-02-24 | Fujitsu Ltd | Chemical vapor-phase growth |
-
1987
- 1987-07-22 JP JP62182585A patent/JP2537887B2/en not_active Expired - Fee Related
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6242419A (en) * | 1985-08-19 | 1987-02-24 | Fujitsu Ltd | Chemical vapor-phase growth |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USRE37737E1 (en) | 1990-09-06 | 2002-06-11 | Tokai Kogyo Kabushiki Kaisha | Automobile windshield molding and method of producing the same |
US6196615B1 (en) | 1990-10-23 | 2001-03-06 | Tokai Kogyo Kabushiki Kaisha | Automobile windshield molding and the method of producing the same |
Also Published As
Publication number | Publication date |
---|---|
JP2537887B2 (en) | 1996-09-25 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |