JPS6428374A - Method for selectively growing tungsten - Google Patents

Method for selectively growing tungsten

Info

Publication number
JPS6428374A
JPS6428374A JP18258587A JP18258587A JPS6428374A JP S6428374 A JPS6428374 A JP S6428374A JP 18258587 A JP18258587 A JP 18258587A JP 18258587 A JP18258587 A JP 18258587A JP S6428374 A JPS6428374 A JP S6428374A
Authority
JP
Japan
Prior art keywords
tungsten
oxide film
silicon oxide
substrate
selectively growing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18258587A
Other languages
Japanese (ja)
Other versions
JP2537887B2 (en
Inventor
Isao Murakami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electronics Corp filed Critical Matsushita Electronics Corp
Priority to JP62182585A priority Critical patent/JP2537887B2/en
Publication of JPS6428374A publication Critical patent/JPS6428374A/en
Application granted granted Critical
Publication of JP2537887B2 publication Critical patent/JP2537887B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

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  • Chemical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)

Abstract

PURPOSE:To grow tungsten only on a prescribed region of the surface of a substrate by selectively masking the surface of the substrate with a silicon oxide film contg. phosphorus at high concn. and by growing tungsten by a chemical vapor growth method. CONSTITUTION:The surface of a substrate is selectively coated with a silicon oxide film contg. phosphorus at high concn. so that tungsten grains are not produced on the silicon oxide film. Tungsten is then grown by a chemical vapor growth method. Thus, tungsten is grown only on a prescribed region not masked with the silicon oxide film.
JP62182585A 1987-07-22 1987-07-22 Selective growth method for tungsten Expired - Fee Related JP2537887B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62182585A JP2537887B2 (en) 1987-07-22 1987-07-22 Selective growth method for tungsten

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62182585A JP2537887B2 (en) 1987-07-22 1987-07-22 Selective growth method for tungsten

Publications (2)

Publication Number Publication Date
JPS6428374A true JPS6428374A (en) 1989-01-30
JP2537887B2 JP2537887B2 (en) 1996-09-25

Family

ID=16120854

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62182585A Expired - Fee Related JP2537887B2 (en) 1987-07-22 1987-07-22 Selective growth method for tungsten

Country Status (1)

Country Link
JP (1) JP2537887B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6196615B1 (en) 1990-10-23 2001-03-06 Tokai Kogyo Kabushiki Kaisha Automobile windshield molding and the method of producing the same
USRE37737E1 (en) 1990-09-06 2002-06-11 Tokai Kogyo Kabushiki Kaisha Automobile windshield molding and method of producing the same

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6242419A (en) * 1985-08-19 1987-02-24 Fujitsu Ltd Chemical vapor-phase growth

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6242419A (en) * 1985-08-19 1987-02-24 Fujitsu Ltd Chemical vapor-phase growth

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USRE37737E1 (en) 1990-09-06 2002-06-11 Tokai Kogyo Kabushiki Kaisha Automobile windshield molding and method of producing the same
US6196615B1 (en) 1990-10-23 2001-03-06 Tokai Kogyo Kabushiki Kaisha Automobile windshield molding and the method of producing the same

Also Published As

Publication number Publication date
JP2537887B2 (en) 1996-09-25

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees