JPS6436756A - Manufacture of perpendicular magnetic recording film - Google Patents

Manufacture of perpendicular magnetic recording film

Info

Publication number
JPS6436756A
JPS6436756A JP19179787A JP19179787A JPS6436756A JP S6436756 A JPS6436756 A JP S6436756A JP 19179787 A JP19179787 A JP 19179787A JP 19179787 A JP19179787 A JP 19179787A JP S6436756 A JPS6436756 A JP S6436756A
Authority
JP
Japan
Prior art keywords
film
magnetic recording
substrate
perpendicular magnetic
manufacture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19179787A
Other languages
Japanese (ja)
Inventor
Atsushi Kamijo
Hitoshi Igarashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP19179787A priority Critical patent/JPS6436756A/en
Publication of JPS6436756A publication Critical patent/JPS6436756A/en
Pending legal-status Critical Current

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  • Physical Vapour Deposition (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Thin Magnetic Films (AREA)

Abstract

PURPOSE:To manufacture a film having a superior perpendicular magnetic properties and also having high magnetic recording density, by alternately laminating Co and Cr on a substrate in super vacuum. CONSTITUTION:The degree of vacuum in a vacuum chamber 6 in the course of vapor deposition is maintained at 10<-8>Torr or above. In this atmosphere, Co and Cr are alternately vapor-deposited and laminated on a substrate, by which a perpendicular magnetic recording film is formed. In this alternately laminated film 13, respective columnar-crystal grains of the above two elements grow in uniform thickness from the substrate 10 toward the film surface, and further, the degree of crystal orientation of this film is comparatively independent on the size of columnal crystalline grain and C axis is sharply oriented owing to the magnitude of the value. Accordingly, magnetic recording density can be improved without deteriorating magnetic properties.
JP19179787A 1987-07-30 1987-07-30 Manufacture of perpendicular magnetic recording film Pending JPS6436756A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19179787A JPS6436756A (en) 1987-07-30 1987-07-30 Manufacture of perpendicular magnetic recording film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19179787A JPS6436756A (en) 1987-07-30 1987-07-30 Manufacture of perpendicular magnetic recording film

Publications (1)

Publication Number Publication Date
JPS6436756A true JPS6436756A (en) 1989-02-07

Family

ID=16280697

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19179787A Pending JPS6436756A (en) 1987-07-30 1987-07-30 Manufacture of perpendicular magnetic recording film

Country Status (1)

Country Link
JP (1) JPS6436756A (en)

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