JPS5648152A - Semiconductor device - Google Patents
Semiconductor deviceInfo
- Publication number
- JPS5648152A JPS5648152A JP12358979A JP12358979A JPS5648152A JP S5648152 A JPS5648152 A JP S5648152A JP 12358979 A JP12358979 A JP 12358979A JP 12358979 A JP12358979 A JP 12358979A JP S5648152 A JPS5648152 A JP S5648152A
- Authority
- JP
- Japan
- Prior art keywords
- outlines
- film
- layer insulating
- insulating film
- difference
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
PURPOSE:To prevent the breaking of a wire by forming gentle stepped sections at a part of the outlines of the opened hole of the first layer insulating film and those of the second layer insulating film on a semiconductor substrate. CONSTITUTION:The first layer insulating film 2 located on an Si substrate 1 completed element formation is opened 3 and the second layer insulating film 4 is placed on the film 2. An opening 5 slightly bigger than the opening 3 is provided on the film 4. The holes 3, 5 shift each other by the outlines 7, 8 where an Al pattern overlaps each other and the remaining outlines shift by a lag caused by an alignment with a photomask and the Si substrate. As a result, the outlines 7, 8 cause a stepped difference in level and the ramining outlines cause a difference in level corresponding to the sum of the film thickness. Therefore, the Al thin film 6 has no sharp difference in level which causes no thinner section than a flat section and the breaking of a wire will be prevented. The yield and quality will be improved.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12358979A JPS5648152A (en) | 1979-09-26 | 1979-09-26 | Semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12358979A JPS5648152A (en) | 1979-09-26 | 1979-09-26 | Semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5648152A true JPS5648152A (en) | 1981-05-01 |
Family
ID=14864329
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12358979A Pending JPS5648152A (en) | 1979-09-26 | 1979-09-26 | Semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5648152A (en) |
-
1979
- 1979-09-26 JP JP12358979A patent/JPS5648152A/en active Pending
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