JPS5642356A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS5642356A
JPS5642356A JP11707379A JP11707379A JPS5642356A JP S5642356 A JPS5642356 A JP S5642356A JP 11707379 A JP11707379 A JP 11707379A JP 11707379 A JP11707379 A JP 11707379A JP S5642356 A JPS5642356 A JP S5642356A
Authority
JP
Japan
Prior art keywords
polysilicon
film
mask
si3n4
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11707379A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6138860B2 (enExample
Inventor
Shiyouji Ariizumi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP11707379A priority Critical patent/JPS5642356A/ja
Publication of JPS5642356A publication Critical patent/JPS5642356A/ja
Publication of JPS6138860B2 publication Critical patent/JPS6138860B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10W20/01—

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP11707379A 1979-09-12 1979-09-12 Manufacture of semiconductor device Granted JPS5642356A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11707379A JPS5642356A (en) 1979-09-12 1979-09-12 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11707379A JPS5642356A (en) 1979-09-12 1979-09-12 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5642356A true JPS5642356A (en) 1981-04-20
JPS6138860B2 JPS6138860B2 (enExample) 1986-09-01

Family

ID=14702733

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11707379A Granted JPS5642356A (en) 1979-09-12 1979-09-12 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5642356A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58121648A (ja) * 1982-01-13 1983-07-20 Fujitsu Ltd 多層配線形成方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0366559U (enExample) * 1989-10-30 1991-06-27

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58121648A (ja) * 1982-01-13 1983-07-20 Fujitsu Ltd 多層配線形成方法

Also Published As

Publication number Publication date
JPS6138860B2 (enExample) 1986-09-01

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