JPS5618751A - Gas detector - Google Patents
Gas detectorInfo
- Publication number
 - JPS5618751A JPS5618751A JP9363979A JP9363979A JPS5618751A JP S5618751 A JPS5618751 A JP S5618751A JP 9363979 A JP9363979 A JP 9363979A JP 9363979 A JP9363979 A JP 9363979A JP S5618751 A JPS5618751 A JP S5618751A
 - Authority
 - JP
 - Japan
 - Prior art keywords
 - gas
 - substance
 - constitution
 - cavity
 - heating units
 - Prior art date
 - Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
 - Granted
 
Links
- 239000000126 substance Substances 0.000 abstract 4
 - VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 3
 - 238000010438 heat treatment Methods 0.000 abstract 3
 - 239000011248 coating agent Substances 0.000 abstract 1
 - 238000000576 coating method Methods 0.000 abstract 1
 - 229910052681 coesite Inorganic materials 0.000 abstract 1
 - 229910052906 cristobalite Inorganic materials 0.000 abstract 1
 - 239000000377 silicon dioxide Substances 0.000 abstract 1
 - 229910052814 silicon oxide Inorganic materials 0.000 abstract 1
 - 229910052682 stishovite Inorganic materials 0.000 abstract 1
 - 239000000758 substrate Substances 0.000 abstract 1
 - 229910052905 tridymite Inorganic materials 0.000 abstract 1
 
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
 
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title | 
|---|---|---|---|
| JP9363979A JPS5618751A (en) | 1979-07-25 | 1979-07-25 | Gas detector | 
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title | 
|---|---|---|---|
| JP9363979A JPS5618751A (en) | 1979-07-25 | 1979-07-25 | Gas detector | 
Publications (2)
| Publication Number | Publication Date | 
|---|---|
| JPS5618751A true JPS5618751A (en) | 1981-02-21 | 
| JPS6122899B2 JPS6122899B2 (en, 2012) | 1986-06-03 | 
Family
ID=14087915
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date | 
|---|---|---|---|
| JP9363979A Granted JPS5618751A (en) | 1979-07-25 | 1979-07-25 | Gas detector | 
Country Status (1)
| Country | Link | 
|---|---|
| JP (1) | JPS5618751A (en, 2012) | 
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title | 
|---|---|---|---|---|
| JPS6050419A (ja) * | 1983-08-26 | 1985-03-20 | イノバス | サ−マル質量流量計 | 
| JPS6295454A (ja) * | 1985-10-22 | 1987-05-01 | Nippon Telegr & Teleph Corp <Ntt> | マイクロガスセンサおよびその製造方法 | 
| JPH01299452A (ja) * | 1988-05-27 | 1989-12-04 | Ricoh Co Ltd | 4端子検出型ガス検出装置 | 
| US5165292A (en) * | 1985-12-09 | 1992-11-24 | Ottosensors Corporation | Channel Device and tube connection and their fabrication procedures | 
- 
        1979
        
- 1979-07-25 JP JP9363979A patent/JPS5618751A/ja active Granted
 
 
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title | 
|---|---|---|---|---|
| JPS6050419A (ja) * | 1983-08-26 | 1985-03-20 | イノバス | サ−マル質量流量計 | 
| JPS6295454A (ja) * | 1985-10-22 | 1987-05-01 | Nippon Telegr & Teleph Corp <Ntt> | マイクロガスセンサおよびその製造方法 | 
| US5165292A (en) * | 1985-12-09 | 1992-11-24 | Ottosensors Corporation | Channel Device and tube connection and their fabrication procedures | 
| JPH01299452A (ja) * | 1988-05-27 | 1989-12-04 | Ricoh Co Ltd | 4端子検出型ガス検出装置 | 
Also Published As
| Publication number | Publication date | 
|---|---|
| JPS6122899B2 (en, 2012) | 1986-06-03 | 
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