JPS5617059A - Semiconductor switching element - Google Patents

Semiconductor switching element

Info

Publication number
JPS5617059A
JPS5617059A JP9226079A JP9226079A JPS5617059A JP S5617059 A JPS5617059 A JP S5617059A JP 9226079 A JP9226079 A JP 9226079A JP 9226079 A JP9226079 A JP 9226079A JP S5617059 A JPS5617059 A JP S5617059A
Authority
JP
Japan
Prior art keywords
film
region
layer
impurity
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9226079A
Other languages
English (en)
Other versions
JPS6140141B2 (ja
Inventor
Motoo Nakano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP9226079A priority Critical patent/JPS5617059A/ja
Publication of JPS5617059A publication Critical patent/JPS5617059A/ja
Publication of JPS6140141B2 publication Critical patent/JPS6140141B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B20/00—Read-only memory [ROM] devices
    • H10B20/20—Programmable ROM [PROM] devices comprising field-effect components
    • H10B20/25—One-time programmable ROM [OTPROM] devices, e.g. using electrically-fusible links
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B20/00—Read-only memory [ROM] devices

Landscapes

  • Read Only Memory (AREA)
  • Design And Manufacture Of Integrated Circuits (AREA)
  • Semiconductor Memories (AREA)
  • Logic Circuits (AREA)
JP9226079A 1979-07-20 1979-07-20 Semiconductor switching element Granted JPS5617059A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9226079A JPS5617059A (en) 1979-07-20 1979-07-20 Semiconductor switching element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9226079A JPS5617059A (en) 1979-07-20 1979-07-20 Semiconductor switching element

Publications (2)

Publication Number Publication Date
JPS5617059A true JPS5617059A (en) 1981-02-18
JPS6140141B2 JPS6140141B2 (ja) 1986-09-08

Family

ID=14049430

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9226079A Granted JPS5617059A (en) 1979-07-20 1979-07-20 Semiconductor switching element

Country Status (1)

Country Link
JP (1) JPS5617059A (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5958839A (ja) * 1982-09-28 1984-04-04 Fujitsu Ltd 半導体装置
JPS59229838A (ja) * 1984-05-21 1984-12-24 Hitachi Ltd 半導体集積回路
JPS6015946A (ja) * 1983-07-08 1985-01-26 Hitachi Ltd 集積回路
WO1992007380A1 (en) * 1990-10-15 1992-04-30 Seiko Epson Corporation Semiconductor device having switching circuit to be switched by light and its fabrication process

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5958839A (ja) * 1982-09-28 1984-04-04 Fujitsu Ltd 半導体装置
JPH0454977B2 (ja) * 1982-09-28 1992-09-01 Fujitsu Ltd
JPS6015946A (ja) * 1983-07-08 1985-01-26 Hitachi Ltd 集積回路
JPH0584062B2 (ja) * 1983-07-08 1993-11-30 Hitachi Seisakusho Kk
JPS59229838A (ja) * 1984-05-21 1984-12-24 Hitachi Ltd 半導体集積回路
WO1992007380A1 (en) * 1990-10-15 1992-04-30 Seiko Epson Corporation Semiconductor device having switching circuit to be switched by light and its fabrication process

Also Published As

Publication number Publication date
JPS6140141B2 (ja) 1986-09-08

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