JPS56161671A - Manufacture of complementary mis semiconductor device - Google Patents
Manufacture of complementary mis semiconductor deviceInfo
- Publication number
- JPS56161671A JPS56161671A JP6411580A JP6411580A JPS56161671A JP S56161671 A JPS56161671 A JP S56161671A JP 6411580 A JP6411580 A JP 6411580A JP 6411580 A JP6411580 A JP 6411580A JP S56161671 A JPS56161671 A JP S56161671A
- Authority
- JP
- Japan
- Prior art keywords
- type
- diffused
- channel
- diffusion
- diffusion constant
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/8238—Complementary field-effect transistors, e.g. CMOS
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6411580A JPS56161671A (en) | 1980-05-16 | 1980-05-16 | Manufacture of complementary mis semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6411580A JPS56161671A (en) | 1980-05-16 | 1980-05-16 | Manufacture of complementary mis semiconductor device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS56161671A true JPS56161671A (en) | 1981-12-12 |
Family
ID=13248741
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6411580A Pending JPS56161671A (en) | 1980-05-16 | 1980-05-16 | Manufacture of complementary mis semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS56161671A (ja) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5269278A (en) * | 1975-12-08 | 1977-06-08 | Hitachi Ltd | Production of s#-gate type complementary mos semiconductor device |
-
1980
- 1980-05-16 JP JP6411580A patent/JPS56161671A/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5269278A (en) * | 1975-12-08 | 1977-06-08 | Hitachi Ltd | Production of s#-gate type complementary mos semiconductor device |
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