JPS5269278A - Production of s#-gate type complementary mos semiconductor device - Google Patents

Production of s#-gate type complementary mos semiconductor device

Info

Publication number
JPS5269278A
JPS5269278A JP50145010A JP14501075A JPS5269278A JP S5269278 A JPS5269278 A JP S5269278A JP 50145010 A JP50145010 A JP 50145010A JP 14501075 A JP14501075 A JP 14501075A JP S5269278 A JPS5269278 A JP S5269278A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
gate type
complementary mos
mos semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50145010A
Other languages
Japanese (ja)
Inventor
Yasunobu Osa
Satoshi Meguro
Koichi Nagasawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP50145010A priority Critical patent/JPS5269278A/en
Publication of JPS5269278A publication Critical patent/JPS5269278A/en
Pending legal-status Critical Current

Links

Landscapes

  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)

Abstract

PURPOSE: To connect directly between N- and P-type MOS gates by adding a N-type impurity also to a poli-Si gate of P-type MOS at the time of formation of N-type MOS and by coating the gate with a thermal oxidization film.
COPYRIGHT: (C)1977,JPO&Japio
JP50145010A 1975-12-08 1975-12-08 Production of s#-gate type complementary mos semiconductor device Pending JPS5269278A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50145010A JPS5269278A (en) 1975-12-08 1975-12-08 Production of s#-gate type complementary mos semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50145010A JPS5269278A (en) 1975-12-08 1975-12-08 Production of s#-gate type complementary mos semiconductor device

Publications (1)

Publication Number Publication Date
JPS5269278A true JPS5269278A (en) 1977-06-08

Family

ID=15375347

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50145010A Pending JPS5269278A (en) 1975-12-08 1975-12-08 Production of s#-gate type complementary mos semiconductor device

Country Status (1)

Country Link
JP (1) JPS5269278A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54111786A (en) * 1978-02-21 1979-09-01 Nec Corp Manufacture for complementary silicon gate mos field effect semiconductor device
JPS56158468A (en) * 1980-02-25 1981-12-07 Harris Corp Method of manufacturing itnegrated circuit
JPS56161671A (en) * 1980-05-16 1981-12-12 Hitachi Ltd Manufacture of complementary mis semiconductor device
JPS58225663A (en) * 1982-06-23 1983-12-27 Toshiba Corp Manufacture of semiconductor device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54111786A (en) * 1978-02-21 1979-09-01 Nec Corp Manufacture for complementary silicon gate mos field effect semiconductor device
JPS56158468A (en) * 1980-02-25 1981-12-07 Harris Corp Method of manufacturing itnegrated circuit
JPS56161671A (en) * 1980-05-16 1981-12-12 Hitachi Ltd Manufacture of complementary mis semiconductor device
JPS58225663A (en) * 1982-06-23 1983-12-27 Toshiba Corp Manufacture of semiconductor device

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