JPS56130648A - Production of ion sensor - Google Patents
Production of ion sensorInfo
- Publication number
- JPS56130648A JPS56130648A JP3389980A JP3389980A JPS56130648A JP S56130648 A JPS56130648 A JP S56130648A JP 3389980 A JP3389980 A JP 3389980A JP 3389980 A JP3389980 A JP 3389980A JP S56130648 A JPS56130648 A JP S56130648A
- Authority
- JP
- Japan
- Prior art keywords
- film
- matter
- surface stabilizing
- ion
- stabilizing film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 150000002500 ions Chemical class 0.000 abstract 5
- 230000000087 stabilizing effect Effects 0.000 abstract 5
- 238000009792 diffusion process Methods 0.000 abstract 4
- 239000012535 impurity Substances 0.000 abstract 3
- 239000002131 composite material Substances 0.000 abstract 2
- 239000000470 constituent Substances 0.000 abstract 2
- 238000005342 ion exchange Methods 0.000 abstract 2
- 239000000126 substance Substances 0.000 abstract 2
- 229910052581 Si3N4 Inorganic materials 0.000 abstract 1
- 229910020286 SiOxNy Inorganic materials 0.000 abstract 1
- 229910052782 aluminium Inorganic materials 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
- 239000011810 insulating material Substances 0.000 abstract 1
- 150000004767 nitrides Chemical class 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
- 238000004544 sputter deposition Methods 0.000 abstract 1
- 229910052715 tantalum Inorganic materials 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/403—Cells and electrode assemblies
- G01N27/414—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
Landscapes
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Molecular Biology (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Engineering & Computer Science (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3389980A JPS56130648A (en) | 1980-03-19 | 1980-03-19 | Production of ion sensor |
GB8021027A GB2072418B (en) | 1980-03-19 | 1980-06-26 | Ion sensor and method of manufacturing the same |
FR8014342A FR2478880A1 (fr) | 1980-03-19 | 1980-06-27 | Capteur ionique et son procede de fabrication |
US06/163,792 US4446474A (en) | 1980-03-19 | 1980-06-27 | Ion sensor FET with surface treated metal gate |
DE3024295A DE3024295C2 (de) | 1980-03-19 | 1980-06-27 | Ionenmessfühler und Verfahren zu dessen Herstellung |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3389980A JPS56130648A (en) | 1980-03-19 | 1980-03-19 | Production of ion sensor |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS56130648A true JPS56130648A (en) | 1981-10-13 |
JPS6319817B2 JPS6319817B2 (enrdf_load_stackoverflow) | 1988-04-25 |
Family
ID=12399366
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3389980A Granted JPS56130648A (en) | 1980-03-19 | 1980-03-19 | Production of ion sensor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS56130648A (enrdf_load_stackoverflow) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5870154A (ja) * | 1981-10-22 | 1983-04-26 | Kuraray Co Ltd | 陽イオンセンサ−の製造法 |
JPS6270749A (ja) * | 1985-09-25 | 1987-04-01 | Toshiba Corp | Fetセンサおよびその製造方法 |
JPH067905A (ja) * | 1993-04-02 | 1994-01-18 | Kobe Steel Ltd | 連続鋳造設備 |
JPH06154963A (ja) * | 1992-11-19 | 1994-06-03 | Nippon Steel Corp | 残湯残滓排出装置 |
WO2009078418A1 (ja) * | 2007-12-18 | 2009-06-25 | Horiba, Ltd. | イオン選択性電極 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51126891A (en) * | 1975-04-28 | 1976-11-05 | Eiji Niki | Ion selective electrode with semiconductor crystal as the sensitive el ement |
JPS51139289A (en) * | 1975-03-12 | 1976-12-01 | Univ Utah | Chemically sensitive fe converter |
-
1980
- 1980-03-19 JP JP3389980A patent/JPS56130648A/ja active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51139289A (en) * | 1975-03-12 | 1976-12-01 | Univ Utah | Chemically sensitive fe converter |
JPS51126891A (en) * | 1975-04-28 | 1976-11-05 | Eiji Niki | Ion selective electrode with semiconductor crystal as the sensitive el ement |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5870154A (ja) * | 1981-10-22 | 1983-04-26 | Kuraray Co Ltd | 陽イオンセンサ−の製造法 |
JPS6270749A (ja) * | 1985-09-25 | 1987-04-01 | Toshiba Corp | Fetセンサおよびその製造方法 |
JPH06154963A (ja) * | 1992-11-19 | 1994-06-03 | Nippon Steel Corp | 残湯残滓排出装置 |
JPH067905A (ja) * | 1993-04-02 | 1994-01-18 | Kobe Steel Ltd | 連続鋳造設備 |
WO2009078418A1 (ja) * | 2007-12-18 | 2009-06-25 | Horiba, Ltd. | イオン選択性電極 |
US8197651B2 (en) | 2007-12-18 | 2012-06-12 | Horiba, Ltd. | Ion-selective electrode |
JP5009318B2 (ja) * | 2007-12-18 | 2012-08-22 | 株式会社堀場製作所 | イオン選択性電極 |
Also Published As
Publication number | Publication date |
---|---|
JPS6319817B2 (enrdf_load_stackoverflow) | 1988-04-25 |
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