JPS5612739A - Semiconductor device - Google Patents
Semiconductor deviceInfo
- Publication number
- JPS5612739A JPS5612739A JP8702979A JP8702979A JPS5612739A JP S5612739 A JPS5612739 A JP S5612739A JP 8702979 A JP8702979 A JP 8702979A JP 8702979 A JP8702979 A JP 8702979A JP S5612739 A JPS5612739 A JP S5612739A
- Authority
- JP
- Japan
- Prior art keywords
- polyimide
- covered
- portions
- aluminum
- type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02118—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer carbon based polymeric organic or inorganic material, e.g. polyimides, poly cyclobutene or PVC
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electrodes Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Formation Of Insulating Films (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8702979A JPS5612739A (en) | 1979-07-10 | 1979-07-10 | Semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8702979A JPS5612739A (en) | 1979-07-10 | 1979-07-10 | Semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5612739A true JPS5612739A (en) | 1981-02-07 |
Family
ID=13903519
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8702979A Pending JPS5612739A (en) | 1979-07-10 | 1979-07-10 | Semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5612739A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5852848A (ja) * | 1981-09-25 | 1983-03-29 | Hitachi Ltd | 多層配線構造 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5354477A (en) * | 1976-10-28 | 1978-05-17 | Seiko Epson Corp | Production of semiconductor device |
JPS5375861A (en) * | 1976-12-17 | 1978-07-05 | Hitachi Ltd | Semiconductor device |
-
1979
- 1979-07-10 JP JP8702979A patent/JPS5612739A/ja active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5354477A (en) * | 1976-10-28 | 1978-05-17 | Seiko Epson Corp | Production of semiconductor device |
JPS5375861A (en) * | 1976-12-17 | 1978-07-05 | Hitachi Ltd | Semiconductor device |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5852848A (ja) * | 1981-09-25 | 1983-03-29 | Hitachi Ltd | 多層配線構造 |
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