JPS56112739A - Inspection of semiconductor substrate - Google Patents

Inspection of semiconductor substrate

Info

Publication number
JPS56112739A
JPS56112739A JP1625880A JP1625880A JPS56112739A JP S56112739 A JPS56112739 A JP S56112739A JP 1625880 A JP1625880 A JP 1625880A JP 1625880 A JP1625880 A JP 1625880A JP S56112739 A JPS56112739 A JP S56112739A
Authority
JP
Japan
Prior art keywords
substrate
semi
insulating
film
region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1625880A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6249985B2 (https=
Inventor
Hideki Yakida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP1625880A priority Critical patent/JPS56112739A/ja
Publication of JPS56112739A publication Critical patent/JPS56112739A/ja
Publication of JPS6249985B2 publication Critical patent/JPS6249985B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices
    • H10P50/60—Wet etching
    • H10P50/64—Wet etching of semiconductor materials
    • H10P50/642—Chemical etching
    • H10P50/646—Chemical etching of Group III-V materials

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP1625880A 1980-02-12 1980-02-12 Inspection of semiconductor substrate Granted JPS56112739A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1625880A JPS56112739A (en) 1980-02-12 1980-02-12 Inspection of semiconductor substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1625880A JPS56112739A (en) 1980-02-12 1980-02-12 Inspection of semiconductor substrate

Publications (2)

Publication Number Publication Date
JPS56112739A true JPS56112739A (en) 1981-09-05
JPS6249985B2 JPS6249985B2 (https=) 1987-10-22

Family

ID=11911530

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1625880A Granted JPS56112739A (en) 1980-02-12 1980-02-12 Inspection of semiconductor substrate

Country Status (1)

Country Link
JP (1) JPS56112739A (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01257439A (ja) * 1987-07-17 1989-10-13 Nippon Flour Mills Co Ltd パスタ類、麺類の調理方法および調理用耐熱容器、包装麺類
JPH01202266A (ja) * 1988-01-28 1989-08-15 Borden Inc 一段階でつくられる調味したパスタ製造物

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53106571A (en) * 1977-02-28 1978-09-16 Nec Corp Testing method of galllium aresenide semi-insulating substrate

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53106571A (en) * 1977-02-28 1978-09-16 Nec Corp Testing method of galllium aresenide semi-insulating substrate

Also Published As

Publication number Publication date
JPS6249985B2 (https=) 1987-10-22

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