JPS5414678A - Processing method for surface of semiconductor device - Google Patents
Processing method for surface of semiconductor deviceInfo
- Publication number
- JPS5414678A JPS5414678A JP7987877A JP7987877A JPS5414678A JP S5414678 A JPS5414678 A JP S5414678A JP 7987877 A JP7987877 A JP 7987877A JP 7987877 A JP7987877 A JP 7987877A JP S5414678 A JPS5414678 A JP S5414678A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- processing method
- dipping
- substrate
- minites
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Semiconductors (AREA)
Abstract
PURPOSE: To prevent the contamination after the process by removing a corrosion-resisting resin film for a mask provided onto a semiconductor substrate while dipping the substrate into chemicals such as sulfuric acid after dipping it in water of 60 to 100°C for 15 to 25 minites to obtain the hydrophilic resin surface.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7987877A JPS5414678A (en) | 1977-07-06 | 1977-07-06 | Processing method for surface of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7987877A JPS5414678A (en) | 1977-07-06 | 1977-07-06 | Processing method for surface of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5414678A true JPS5414678A (en) | 1979-02-03 |
Family
ID=13702479
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7987877A Pending JPS5414678A (en) | 1977-07-06 | 1977-07-06 | Processing method for surface of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5414678A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5006415A (en) * | 1987-01-16 | 1991-04-09 | Kyowa Gas Chemical Industry Co., Ltd. | Molded article of methacrylic resin |
-
1977
- 1977-07-06 JP JP7987877A patent/JPS5414678A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5006415A (en) * | 1987-01-16 | 1991-04-09 | Kyowa Gas Chemical Industry Co., Ltd. | Molded article of methacrylic resin |
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