JPS5376558A - Automatic rinsing device - Google Patents
Automatic rinsing deviceInfo
- Publication number
- JPS5376558A JPS5376558A JP15093876A JP15093876A JPS5376558A JP S5376558 A JPS5376558 A JP S5376558A JP 15093876 A JP15093876 A JP 15093876A JP 15093876 A JP15093876 A JP 15093876A JP S5376558 A JPS5376558 A JP S5376558A
- Authority
- JP
- Japan
- Prior art keywords
- rinsing device
- automatic rinsing
- tank
- article
- automatic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Abstract
PURPOSE: To always obtain clean article to be treated by functioning one tank as a rinsing tank for a silicon wafer or the like and underwater storage tank and mechanizing the handling and conveyance of the article to reduce the size of an automatic rinsing device.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15093876A JPS6018229B2 (en) | 1976-12-17 | 1976-12-17 | automatic flushing device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15093876A JPS6018229B2 (en) | 1976-12-17 | 1976-12-17 | automatic flushing device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5376558A true JPS5376558A (en) | 1978-07-07 |
JPS6018229B2 JPS6018229B2 (en) | 1985-05-09 |
Family
ID=15507684
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15093876A Expired JPS6018229B2 (en) | 1976-12-17 | 1976-12-17 | automatic flushing device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6018229B2 (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6159843U (en) * | 1984-09-26 | 1986-04-22 | ||
JPS6220131U (en) * | 1985-07-23 | 1987-02-06 |
-
1976
- 1976-12-17 JP JP15093876A patent/JPS6018229B2/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS6018229B2 (en) | 1985-05-09 |
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