JPS5212579A - Ion injection method and ion injector - Google Patents

Ion injection method and ion injector

Info

Publication number
JPS5212579A
JPS5212579A JP8829775A JP8829775A JPS5212579A JP S5212579 A JPS5212579 A JP S5212579A JP 8829775 A JP8829775 A JP 8829775A JP 8829775 A JP8829775 A JP 8829775A JP S5212579 A JPS5212579 A JP S5212579A
Authority
JP
Japan
Prior art keywords
ion
injection method
injector
region
ion injection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8829775A
Other languages
Japanese (ja)
Inventor
Minoru Ono
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP8829775A priority Critical patent/JPS5212579A/en
Publication of JPS5212579A publication Critical patent/JPS5212579A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: An ion injection method which makes a diffusion layer without crystal defect in a selective region of a semi-conductor region, whose conductive type is different from that of the above region.
COPYRIGHT: (C)1977,JPO&Japio
JP8829775A 1975-07-21 1975-07-21 Ion injection method and ion injector Pending JPS5212579A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8829775A JPS5212579A (en) 1975-07-21 1975-07-21 Ion injection method and ion injector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8829775A JPS5212579A (en) 1975-07-21 1975-07-21 Ion injection method and ion injector

Publications (1)

Publication Number Publication Date
JPS5212579A true JPS5212579A (en) 1977-01-31

Family

ID=13938976

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8829775A Pending JPS5212579A (en) 1975-07-21 1975-07-21 Ion injection method and ion injector

Country Status (1)

Country Link
JP (1) JPS5212579A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59678A (en) * 1982-05-28 1984-01-05 Shimadzu Corp Detector
JPS6031216U (en) * 1983-08-10 1985-03-02 ヤンマー農機株式会社 Seeding and fertilizing equipment
JPH03222479A (en) * 1990-01-29 1991-10-01 Nec Corp Shockley diode

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59678A (en) * 1982-05-28 1984-01-05 Shimadzu Corp Detector
JPS6031216U (en) * 1983-08-10 1985-03-02 ヤンマー農機株式会社 Seeding and fertilizing equipment
JPH039603Y2 (en) * 1983-08-10 1991-03-11
JPH03222479A (en) * 1990-01-29 1991-10-01 Nec Corp Shockley diode

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