JPS56100443A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS56100443A
JPS56100443A JP386480A JP386480A JPS56100443A JP S56100443 A JPS56100443 A JP S56100443A JP 386480 A JP386480 A JP 386480A JP 386480 A JP386480 A JP 386480A JP S56100443 A JPS56100443 A JP S56100443A
Authority
JP
Japan
Prior art keywords
openings
poly
si3n4
layer
mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP386480A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6231492B2 (enrdf_load_stackoverflow
Inventor
Kazuhiko Tsuji
Takashi Hirao
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP386480A priority Critical patent/JPS56100443A/ja
Publication of JPS56100443A publication Critical patent/JPS56100443A/ja
Publication of JPS6231492B2 publication Critical patent/JPS6231492B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/76202—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using a local oxidation of silicon, e.g. LOCOS, SWAMI, SILO

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Local Oxidation Of Silicon (AREA)
  • Element Separation (AREA)
  • Weting (AREA)
JP386480A 1980-01-16 1980-01-16 Manufacture of semiconductor device Granted JPS56100443A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP386480A JPS56100443A (en) 1980-01-16 1980-01-16 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP386480A JPS56100443A (en) 1980-01-16 1980-01-16 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS56100443A true JPS56100443A (en) 1981-08-12
JPS6231492B2 JPS6231492B2 (enrdf_load_stackoverflow) 1987-07-08

Family

ID=11569056

Family Applications (1)

Application Number Title Priority Date Filing Date
JP386480A Granted JPS56100443A (en) 1980-01-16 1980-01-16 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS56100443A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60128636A (ja) * 1983-12-16 1985-07-09 Toshiba Corp 半導体装置の製造方法
US4667244A (en) * 1983-11-29 1987-05-19 Kabushiki Kaisha Toshiba Paper feeding apparatus
JPS63202530A (ja) * 1987-02-17 1988-08-22 Canon Inc 給紙装置
JPS63277139A (ja) * 1987-02-17 1988-11-15 Canon Inc 給紙装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4667244A (en) * 1983-11-29 1987-05-19 Kabushiki Kaisha Toshiba Paper feeding apparatus
JPS60128636A (ja) * 1983-12-16 1985-07-09 Toshiba Corp 半導体装置の製造方法
JPS63202530A (ja) * 1987-02-17 1988-08-22 Canon Inc 給紙装置
JPS63277139A (ja) * 1987-02-17 1988-11-15 Canon Inc 給紙装置

Also Published As

Publication number Publication date
JPS6231492B2 (enrdf_load_stackoverflow) 1987-07-08

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