JPS5747872A - Manufacture of minute structure - Google Patents
Manufacture of minute structureInfo
- Publication number
- JPS5747872A JPS5747872A JP12068680A JP12068680A JPS5747872A JP S5747872 A JPS5747872 A JP S5747872A JP 12068680 A JP12068680 A JP 12068680A JP 12068680 A JP12068680 A JP 12068680A JP S5747872 A JPS5747872 A JP S5747872A
- Authority
- JP
- Japan
- Prior art keywords
- film
- substrate
- edge
- manufacture
- cut
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Abstract
PURPOSE: To easily make an undercut part larger by cutting notches or holes in an edge part of a thin film pattern formed on a substrate and etching the substrate.
CONSTITUTION: An SiO2 film 2 is formed on the (111) crystal face of an Si substrate 1, and a window is made in the film 2 with a mask. Notches 4 are cut in an edge of the film 2, or small through holes 5 are cut in a part of the film 2 close to the edge. The substrate 1 is then etched. Thus, a larger undercut part B can be obtd.
COPYRIGHT: (C)1982,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12068680A JPS5747872A (en) | 1980-09-02 | 1980-09-02 | Manufacture of minute structure |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12068680A JPS5747872A (en) | 1980-09-02 | 1980-09-02 | Manufacture of minute structure |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5747872A true JPS5747872A (en) | 1982-03-18 |
JPS6335713B2 JPS6335713B2 (en) | 1988-07-15 |
Family
ID=14792436
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12068680A Granted JPS5747872A (en) | 1980-09-02 | 1980-09-02 | Manufacture of minute structure |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5747872A (en) |
-
1980
- 1980-09-02 JP JP12068680A patent/JPS5747872A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS6335713B2 (en) | 1988-07-15 |
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