JPS5747872A - Manufacture of minute structure - Google Patents

Manufacture of minute structure

Info

Publication number
JPS5747872A
JPS5747872A JP12068680A JP12068680A JPS5747872A JP S5747872 A JPS5747872 A JP S5747872A JP 12068680 A JP12068680 A JP 12068680A JP 12068680 A JP12068680 A JP 12068680A JP S5747872 A JPS5747872 A JP S5747872A
Authority
JP
Japan
Prior art keywords
film
substrate
edge
manufacture
cut
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12068680A
Other languages
Japanese (ja)
Other versions
JPS6335713B2 (en
Inventor
Takuro Sekiya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ricoh Co Ltd
Original Assignee
Ricoh Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ricoh Co Ltd filed Critical Ricoh Co Ltd
Priority to JP12068680A priority Critical patent/JPS5747872A/en
Publication of JPS5747872A publication Critical patent/JPS5747872A/en
Publication of JPS6335713B2 publication Critical patent/JPS6335713B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)

Abstract

PURPOSE: To easily make an undercut part larger by cutting notches or holes in an edge part of a thin film pattern formed on a substrate and etching the substrate.
CONSTITUTION: An SiO2 film 2 is formed on the (111) crystal face of an Si substrate 1, and a window is made in the film 2 with a mask. Notches 4 are cut in an edge of the film 2, or small through holes 5 are cut in a part of the film 2 close to the edge. The substrate 1 is then etched. Thus, a larger undercut part B can be obtd.
COPYRIGHT: (C)1982,JPO&Japio
JP12068680A 1980-09-02 1980-09-02 Manufacture of minute structure Granted JPS5747872A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12068680A JPS5747872A (en) 1980-09-02 1980-09-02 Manufacture of minute structure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12068680A JPS5747872A (en) 1980-09-02 1980-09-02 Manufacture of minute structure

Publications (2)

Publication Number Publication Date
JPS5747872A true JPS5747872A (en) 1982-03-18
JPS6335713B2 JPS6335713B2 (en) 1988-07-15

Family

ID=14792436

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12068680A Granted JPS5747872A (en) 1980-09-02 1980-09-02 Manufacture of minute structure

Country Status (1)

Country Link
JP (1) JPS5747872A (en)

Also Published As

Publication number Publication date
JPS6335713B2 (en) 1988-07-15

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