JPS575368A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS575368A JPS575368A JP8001180A JP8001180A JPS575368A JP S575368 A JPS575368 A JP S575368A JP 8001180 A JP8001180 A JP 8001180A JP 8001180 A JP8001180 A JP 8001180A JP S575368 A JPS575368 A JP S575368A
- Authority
- JP
- Japan
- Prior art keywords
- silicon film
- film
- etched
- dioxidized
- semiconductor device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title abstract 2
- 238000004519 manufacturing process Methods 0.000 title 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 5
- 229910052710 silicon Inorganic materials 0.000 abstract 5
- 239000010703 silicon Substances 0.000 abstract 5
- 238000000034 method Methods 0.000 abstract 1
- 230000003647 oxidation Effects 0.000 abstract 1
- 238000007254 oxidation reaction Methods 0.000 abstract 1
- 230000001590 oxidative effect Effects 0.000 abstract 1
- 229920002120 photoresistant polymer Polymers 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/86—Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
- H01L29/861—Diodes
Abstract
PURPOSE:To unnecessitate a special mask in a semiconductor device by forming a guard ring region in a self-alignment manner with selective oxidation technique. CONSTITUTION:A dioxidized silicon film 2, a nitrided silicon film 3 and a dioxidized silicon film 4 are sequentially covered on the front surface of a substrate 1, and are pattern etched by a photo resist film 5. Then, the film 5 is removed, it is thermally oxidized, and a field dioxidized silicon film 6 is formed. Then, the nitrided silicon film 3 is etched, is annealed in oxidative atmosphere, and a P<+> type region 7 forming a guard ring is formed. Thereafter, the film 3 is etched and removed, and an electrode 8 is formed.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8001180A JPS575368A (en) | 1980-06-13 | 1980-06-13 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8001180A JPS575368A (en) | 1980-06-13 | 1980-06-13 | Manufacture of semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS575368A true JPS575368A (en) | 1982-01-12 |
JPS6250986B2 JPS6250986B2 (en) | 1987-10-28 |
Family
ID=13706374
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8001180A Granted JPS575368A (en) | 1980-06-13 | 1980-06-13 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS575368A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61113430U (en) * | 1984-12-27 | 1986-07-17 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01209138A (en) * | 1988-02-18 | 1989-08-22 | Bita:Kk | Method for printing white card |
JPH036979U (en) * | 1989-06-06 | 1991-01-23 |
-
1980
- 1980-06-13 JP JP8001180A patent/JPS575368A/en active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61113430U (en) * | 1984-12-27 | 1986-07-17 |
Also Published As
Publication number | Publication date |
---|---|
JPS6250986B2 (en) | 1987-10-28 |
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