JPS5593268A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS5593268A
JPS5593268A JP16582078A JP16582078A JPS5593268A JP S5593268 A JPS5593268 A JP S5593268A JP 16582078 A JP16582078 A JP 16582078A JP 16582078 A JP16582078 A JP 16582078A JP S5593268 A JPS5593268 A JP S5593268A
Authority
JP
Japan
Prior art keywords
insulating film
layer
poly
manufacture
semiconductor device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16582078A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6146964B2 (enrdf_load_stackoverflow
Inventor
Motoo Nakano
Haruhisa Mori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP16582078A priority Critical patent/JPS5593268A/ja
Publication of JPS5593268A publication Critical patent/JPS5593268A/ja
Publication of JPS6146964B2 publication Critical patent/JPS6146964B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Bipolar Transistors (AREA)
JP16582078A 1978-12-30 1978-12-30 Manufacture of semiconductor device Granted JPS5593268A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16582078A JPS5593268A (en) 1978-12-30 1978-12-30 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16582078A JPS5593268A (en) 1978-12-30 1978-12-30 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5593268A true JPS5593268A (en) 1980-07-15
JPS6146964B2 JPS6146964B2 (enrdf_load_stackoverflow) 1986-10-16

Family

ID=15819608

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16582078A Granted JPS5593268A (en) 1978-12-30 1978-12-30 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5593268A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62232123A (ja) * 1986-03-31 1987-10-12 Mitsubishi Electric Corp 半導体装置の製造方法
JPH01134916A (ja) * 1987-11-19 1989-05-26 Nec Yamagata Ltd 半導体装置の製造方法
JPH01259529A (ja) * 1988-04-09 1989-10-17 Toshiba Corp 半導体装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62232123A (ja) * 1986-03-31 1987-10-12 Mitsubishi Electric Corp 半導体装置の製造方法
JPH01134916A (ja) * 1987-11-19 1989-05-26 Nec Yamagata Ltd 半導体装置の製造方法
JPH01259529A (ja) * 1988-04-09 1989-10-17 Toshiba Corp 半導体装置

Also Published As

Publication number Publication date
JPS6146964B2 (enrdf_load_stackoverflow) 1986-10-16

Similar Documents

Publication Publication Date Title
JPS54589A (en) Burying method of insulator
JPS5593268A (en) Manufacture of semiconductor device
JPS57154855A (en) Manufacture of semiconductor device
JPS54128668A (en) Manufacture for electronic component device
EP0362571A3 (en) Method for forming semiconductor components
JPS5267963A (en) Manufacture of semiconductor unit
JPS5286782A (en) Production of semiconductor integrated circuit
JPS5527684A (en) Manufacturing method of semiconductor device
JPS52119084A (en) Manufacture of semiconductor integrated circuit
JPS546775A (en) Semiconductor device featuring stepped electrode structure
JPS51117885A (en) Semiconductor device manufacturing method
JPS5341986A (en) Production of semiconductor unit
JPS5210070A (en) Method for manufacturing silicon semiconductor device
JPS5513994A (en) Integrated circuit device
JPS5417663A (en) Manufacture of semiconductor device
JPS51135475A (en) Manufacturing process of a semiconductor integrated circuit
JPS5544755A (en) Semiconductor container
JPS5418673A (en) Semiconductor device and its manufacture
JPS556866A (en) Semiconductor device
JPS5412276A (en) Semiconductor device
JPS5527662A (en) Method of manufacturing semiconductor device
JPS5391590A (en) Manufacture of semiconductor device
JPS5351978A (en) Manufacture of semiconductor device
JPS5413278A (en) Manufacture for semiconductor device
JPS5370330A (en) Electrical insulating apparatus and its manufacturing method