JPS5412276A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPS5412276A
JPS5412276A JP7216078A JP7216078A JPS5412276A JP S5412276 A JPS5412276 A JP S5412276A JP 7216078 A JP7216078 A JP 7216078A JP 7216078 A JP7216078 A JP 7216078A JP S5412276 A JPS5412276 A JP S5412276A
Authority
JP
Japan
Prior art keywords
conductor layers
layers
insulating film
making
gate insulating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7216078A
Other languages
Japanese (ja)
Inventor
Seiichi Iwamatsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP7216078A priority Critical patent/JPS5412276A/en
Publication of JPS5412276A publication Critical patent/JPS5412276A/en
Pending legal-status Critical Current

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Abstract

PURPOSE: To make possible low voltage operation and improve the dielectric strength between conductor layers by making the gate insulating film between two layers of conductor layers andthe surface of a semiconductor substrate thinner and making the insulating film between the conductor layers thicker than gate insulating film. in a MOS element having two layers of conductor layers.
COPYRIGHT: (C)1979,JPO&Japio
JP7216078A 1978-06-16 1978-06-16 Semiconductor device Pending JPS5412276A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7216078A JPS5412276A (en) 1978-06-16 1978-06-16 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7216078A JPS5412276A (en) 1978-06-16 1978-06-16 Semiconductor device

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP4251571A Division JPS5443356B2 (en) 1971-06-16 1971-06-16

Publications (1)

Publication Number Publication Date
JPS5412276A true JPS5412276A (en) 1979-01-29

Family

ID=13481214

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7216078A Pending JPS5412276A (en) 1978-06-16 1978-06-16 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS5412276A (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5026912A (en) * 1973-07-12 1975-03-20
JPS5123865A (en) * 1974-06-27 1976-02-26 Amchem Prod

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5026912A (en) * 1973-07-12 1975-03-20
JPS5123865A (en) * 1974-06-27 1976-02-26 Amchem Prod

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