JPS5320781A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS5320781A JPS5320781A JP9513576A JP9513576A JPS5320781A JP S5320781 A JPS5320781 A JP S5320781A JP 9513576 A JP9513576 A JP 9513576A JP 9513576 A JP9513576 A JP 9513576A JP S5320781 A JPS5320781 A JP S5320781A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor device
- conductor layer
- gates
- specifying
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Weting (AREA)
- Non-Volatile Memory (AREA)
Abstract
PURPOSE: To suppress the production of the protrusions of a second conductor layer, reduce the leakage current between gates and increase breakdown voltage by specifying the thickness of the insulation oxide film between the first conductor layer and second conductor layer in a semiconductor device having a double layer gate structure.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9513576A JPS5320781A (en) | 1976-08-10 | 1976-08-10 | Production of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9513576A JPS5320781A (en) | 1976-08-10 | 1976-08-10 | Production of semiconductor device |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP25750984A Division JPS60149167A (en) | 1984-12-07 | 1984-12-07 | Semiconductor device and manufacture thereof |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5320781A true JPS5320781A (en) | 1978-02-25 |
Family
ID=14129365
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9513576A Pending JPS5320781A (en) | 1976-08-10 | 1976-08-10 | Production of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5320781A (en) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4917687A (en) * | 1972-06-05 | 1974-02-16 | ||
JPS5012978A (en) * | 1973-05-23 | 1975-02-10 |
-
1976
- 1976-08-10 JP JP9513576A patent/JPS5320781A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4917687A (en) * | 1972-06-05 | 1974-02-16 | ||
JPS5012978A (en) * | 1973-05-23 | 1975-02-10 |
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