JPS5413278A - Manufacture for semiconductor device - Google Patents

Manufacture for semiconductor device

Info

Publication number
JPS5413278A
JPS5413278A JP7776977A JP7776977A JPS5413278A JP S5413278 A JPS5413278 A JP S5413278A JP 7776977 A JP7776977 A JP 7776977A JP 7776977 A JP7776977 A JP 7776977A JP S5413278 A JPS5413278 A JP S5413278A
Authority
JP
Japan
Prior art keywords
transistor
manufacture
semiconductor device
resin
groove
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7776977A
Other languages
Japanese (ja)
Inventor
Yoshiyuki Hirose
Taiji Usui
Susumu Matsuoka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP7776977A priority Critical patent/JPS5413278A/en
Publication of JPS5413278A publication Critical patent/JPS5413278A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To establish air separation transistor of high dielectric strength, by forming the V-shape groove for transistor separation on the semiconductor substrate on which a transistor is formed with anisotropical etching solution, and by removing only resin after filling the groove with resin and coating wiring.
COPYRIGHT: (C)1979,JPO&Japio
JP7776977A 1977-07-01 1977-07-01 Manufacture for semiconductor device Pending JPS5413278A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7776977A JPS5413278A (en) 1977-07-01 1977-07-01 Manufacture for semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7776977A JPS5413278A (en) 1977-07-01 1977-07-01 Manufacture for semiconductor device

Publications (1)

Publication Number Publication Date
JPS5413278A true JPS5413278A (en) 1979-01-31

Family

ID=13643143

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7776977A Pending JPS5413278A (en) 1977-07-01 1977-07-01 Manufacture for semiconductor device

Country Status (1)

Country Link
JP (1) JPS5413278A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4685199A (en) * 1986-04-29 1987-08-11 Rca Corporation Method for forming dielectrically isolated PMOS, NMOS, PNP and NPN transistors on a silicon wafer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4685199A (en) * 1986-04-29 1987-08-11 Rca Corporation Method for forming dielectrically isolated PMOS, NMOS, PNP and NPN transistors on a silicon wafer

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