JPS5591877A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS5591877A JPS5591877A JP16581678A JP16581678A JPS5591877A JP S5591877 A JPS5591877 A JP S5591877A JP 16581678 A JP16581678 A JP 16581678A JP 16581678 A JP16581678 A JP 16581678A JP S5591877 A JPS5591877 A JP S5591877A
- Authority
- JP
- Japan
- Prior art keywords
- channel cut
- window
- requiring high
- opened
- operated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Semiconductor Memories (AREA)
- Non-Volatile Memory (AREA)
Abstract
PURPOSE: To achieve high integration by making it possible to form channel cut regions of different channel cut concentrations.
CONSTITUTION: Oxide film 22 and silicon nitride film 23 are formed on substrate 21, and the entire portion is window-opened wherein channel cut regions are to be formed through proper mask, and then ion injection is operated for low concentration channel cut. Next, the portion requiring high concentration channel cut is masked and ion injection is operated to get the specified concentration after window- opened through the mask. In the part not requiring high concentration channel cut, it is possible to maintain a high breakdown voltage in the junction between the source-drain region and the channel cut region. In the part requiring high concentration channel cut, a high breakdown voltage can be maintained by some other means, for example, the use of a pattern margin. Thus, high integration can be achieved.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16581678A JPS5591877A (en) | 1978-12-30 | 1978-12-30 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16581678A JPS5591877A (en) | 1978-12-30 | 1978-12-30 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5591877A true JPS5591877A (en) | 1980-07-11 |
Family
ID=15819531
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16581678A Pending JPS5591877A (en) | 1978-12-30 | 1978-12-30 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5591877A (en) |
Cited By (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56116670A (en) * | 1980-02-20 | 1981-09-12 | Hitachi Ltd | Semiconductor integrated circuit device and manufacture thereof |
JPS57128975A (en) * | 1981-02-02 | 1982-08-10 | Toshiba Corp | Manufacture of semiconductor nonvolatile memory storage |
JPS57155771A (en) * | 1981-03-23 | 1982-09-25 | Hitachi Ltd | Semiconductor integrated circuit device |
JPS594170A (en) * | 1982-06-30 | 1984-01-10 | Mitsubishi Electric Corp | Manufacture of semiconductor device |
JPS5916371A (en) * | 1982-07-19 | 1984-01-27 | Nec Corp | Nonvolatile semiconductor memory |
JPS5935477A (en) * | 1982-08-23 | 1984-02-27 | Seiko Epson Corp | Semiconductor device |
JPS5951561A (en) * | 1982-09-17 | 1984-03-26 | Mitsubishi Electric Corp | Semiconductor device for memory |
JPS5984571A (en) * | 1982-11-08 | 1984-05-16 | Hitachi Ltd | Semiconductor integrated circuit device and manufacture thereof |
JPS6127680A (en) * | 1984-07-18 | 1986-02-07 | Toshiba Corp | Manufacture of semiconductor memory |
JPS61131488A (en) * | 1984-11-26 | 1986-06-19 | エツセジーエツセ ミクロエレツトロニカ ソチエタ ペル アノニマ | Manufacture of integrated structural body containing non-volatile memory cell and associated transistor having self-matched silicon layer |
JPS63205964A (en) * | 1987-02-21 | 1988-08-25 | Toshiba Corp | Semiconductor storage device and its manufacture |
JPH02374A (en) * | 1988-12-01 | 1990-01-05 | Mitsubishi Electric Corp | Non-volatile semiconductor storage device |
JPH02150070A (en) * | 1988-11-30 | 1990-06-08 | Mitsubishi Electric Corp | Semiconductor memory |
JPH02153574A (en) * | 1989-05-24 | 1990-06-13 | Hitachi Ltd | Manufacture of semiconductor integrated circuit device |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53120383A (en) * | 1977-03-30 | 1978-10-20 | Fujitsu Ltd | Production of semiconductor device |
-
1978
- 1978-12-30 JP JP16581678A patent/JPS5591877A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53120383A (en) * | 1977-03-30 | 1978-10-20 | Fujitsu Ltd | Production of semiconductor device |
Cited By (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56116670A (en) * | 1980-02-20 | 1981-09-12 | Hitachi Ltd | Semiconductor integrated circuit device and manufacture thereof |
JPS57128975A (en) * | 1981-02-02 | 1982-08-10 | Toshiba Corp | Manufacture of semiconductor nonvolatile memory storage |
JPS57155771A (en) * | 1981-03-23 | 1982-09-25 | Hitachi Ltd | Semiconductor integrated circuit device |
JPS636155B2 (en) * | 1982-06-30 | 1988-02-08 | Mitsubishi Electric Corp | |
JPS594170A (en) * | 1982-06-30 | 1984-01-10 | Mitsubishi Electric Corp | Manufacture of semiconductor device |
JPS5916371A (en) * | 1982-07-19 | 1984-01-27 | Nec Corp | Nonvolatile semiconductor memory |
JPS5935477A (en) * | 1982-08-23 | 1984-02-27 | Seiko Epson Corp | Semiconductor device |
JPS5951561A (en) * | 1982-09-17 | 1984-03-26 | Mitsubishi Electric Corp | Semiconductor device for memory |
JPS5984571A (en) * | 1982-11-08 | 1984-05-16 | Hitachi Ltd | Semiconductor integrated circuit device and manufacture thereof |
JPH0554268B2 (en) * | 1982-11-08 | 1993-08-12 | Hitachi Ltd | |
JPS6127680A (en) * | 1984-07-18 | 1986-02-07 | Toshiba Corp | Manufacture of semiconductor memory |
JPS6311785B2 (en) * | 1984-07-18 | 1988-03-16 | Tokyo Shibaura Electric Co | |
JPS61131488A (en) * | 1984-11-26 | 1986-06-19 | エツセジーエツセ ミクロエレツトロニカ ソチエタ ペル アノニマ | Manufacture of integrated structural body containing non-volatile memory cell and associated transistor having self-matched silicon layer |
JPS63205964A (en) * | 1987-02-21 | 1988-08-25 | Toshiba Corp | Semiconductor storage device and its manufacture |
JPH02150070A (en) * | 1988-11-30 | 1990-06-08 | Mitsubishi Electric Corp | Semiconductor memory |
JPH02374A (en) * | 1988-12-01 | 1990-01-05 | Mitsubishi Electric Corp | Non-volatile semiconductor storage device |
JPH02153574A (en) * | 1989-05-24 | 1990-06-13 | Hitachi Ltd | Manufacture of semiconductor integrated circuit device |
JPH0449270B2 (en) * | 1989-05-24 | 1992-08-11 | Hitachi Ltd |
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