JPS5342571A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS5342571A JPS5342571A JP11799276A JP11799276A JPS5342571A JP S5342571 A JPS5342571 A JP S5342571A JP 11799276 A JP11799276 A JP 11799276A JP 11799276 A JP11799276 A JP 11799276A JP S5342571 A JPS5342571 A JP S5342571A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor device
- substrate
- mosfets
- resist
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE:To increase the scale of integration of MOSFETs by diffusion-forming drain, source regions in a semiconductor substrate, thereafter removing the oxide film used for mask, covering only the channel parts with resist, implanting impurity ions of the same conductivity type as that of the substrate, then providing gate regions therein.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11799276A JPS5342571A (en) | 1976-09-29 | 1976-09-29 | Production of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11799276A JPS5342571A (en) | 1976-09-29 | 1976-09-29 | Production of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5342571A true JPS5342571A (en) | 1978-04-18 |
Family
ID=14725337
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11799276A Pending JPS5342571A (en) | 1976-09-29 | 1976-09-29 | Production of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5342571A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1073256C (en) * | 1995-01-19 | 2001-10-17 | 美国3M公司 | Method for coating magnetic recording medium |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50120580A (en) * | 1974-03-07 | 1975-09-20 | ||
JPS5136882A (en) * | 1974-09-24 | 1976-03-27 | Nippon Electric Co | DENKAIKOKAHANDOTAISOCHINOSEIZOHOHO |
JPS5156186A (en) * | 1974-11-13 | 1976-05-17 | Suwa Seikosha Kk | HANDOTAISHUSEKIKAIRONO ZETSUENHOHO |
-
1976
- 1976-09-29 JP JP11799276A patent/JPS5342571A/en active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50120580A (en) * | 1974-03-07 | 1975-09-20 | ||
JPS5136882A (en) * | 1974-09-24 | 1976-03-27 | Nippon Electric Co | DENKAIKOKAHANDOTAISOCHINOSEIZOHOHO |
JPS5156186A (en) * | 1974-11-13 | 1976-05-17 | Suwa Seikosha Kk | HANDOTAISHUSEKIKAIRONO ZETSUENHOHO |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1073256C (en) * | 1995-01-19 | 2001-10-17 | 美国3M公司 | Method for coating magnetic recording medium |
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Legal Events
Date | Code | Title | Description |
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R250 | Receipt of annual fees |
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R250 | Receipt of annual fees |
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FPAY | Renewal fee payment (prs date is renewal date of database) |
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FPAY | Renewal fee payment (prs date is renewal date of database) |
Year of fee payment: 15 Free format text: PAYMENT UNTIL: 20100823 |
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LAPS | Cancellation because of no payment of annual fees |