JPS5536976A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS5536976A JPS5536976A JP11015778A JP11015778A JPS5536976A JP S5536976 A JPS5536976 A JP S5536976A JP 11015778 A JP11015778 A JP 11015778A JP 11015778 A JP11015778 A JP 11015778A JP S5536976 A JPS5536976 A JP S5536976A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- electrodes
- oxide layer
- deposited
- gate oxide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title abstract 2
- 230000005540 biological transmission Effects 0.000 abstract 3
- 239000000758 substrate Substances 0.000 abstract 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract 1
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
- 238000002347 injection Methods 0.000 abstract 1
- 239000007924 injection Substances 0.000 abstract 1
- 230000008018 melting Effects 0.000 abstract 1
- 238000002844 melting Methods 0.000 abstract 1
- 239000002184 metal Substances 0.000 abstract 1
- 229910052751 metal Inorganic materials 0.000 abstract 1
- 230000003647 oxidation Effects 0.000 abstract 1
- 238000007254 oxidation reaction Methods 0.000 abstract 1
- 229910052760 oxygen Inorganic materials 0.000 abstract 1
- 239000001301 oxygen Substances 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
Landscapes
- Solid State Image Pick-Up Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11015778A JPS5536976A (en) | 1978-09-05 | 1978-09-05 | Production of semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11015778A JPS5536976A (en) | 1978-09-05 | 1978-09-05 | Production of semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5536976A true JPS5536976A (en) | 1980-03-14 |
| JPS6120153B2 JPS6120153B2 (enrdf_load_stackoverflow) | 1986-05-21 |
Family
ID=14528489
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11015778A Granted JPS5536976A (en) | 1978-09-05 | 1978-09-05 | Production of semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5536976A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5749270A (en) * | 1980-09-09 | 1982-03-23 | Matsushita Electric Ind Co Ltd | Manufacture of semiconductor device |
| JPS61196575A (ja) * | 1985-02-25 | 1986-08-30 | Sony Tektronix Corp | 単相電荷結合素子 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5389374A (en) * | 1977-01-18 | 1978-08-05 | Toshiba Corp | Production of semiconductor device |
-
1978
- 1978-09-05 JP JP11015778A patent/JPS5536976A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5389374A (en) * | 1977-01-18 | 1978-08-05 | Toshiba Corp | Production of semiconductor device |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5749270A (en) * | 1980-09-09 | 1982-03-23 | Matsushita Electric Ind Co Ltd | Manufacture of semiconductor device |
| JPS61196575A (ja) * | 1985-02-25 | 1986-08-30 | Sony Tektronix Corp | 単相電荷結合素子 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6120153B2 (enrdf_load_stackoverflow) | 1986-05-21 |
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