JPS6120153B2 - - Google Patents

Info

Publication number
JPS6120153B2
JPS6120153B2 JP53110157A JP11015778A JPS6120153B2 JP S6120153 B2 JPS6120153 B2 JP S6120153B2 JP 53110157 A JP53110157 A JP 53110157A JP 11015778 A JP11015778 A JP 11015778A JP S6120153 B2 JPS6120153 B2 JP S6120153B2
Authority
JP
Japan
Prior art keywords
film
oxide film
gate
forming
polycrystalline silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP53110157A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5536976A (en
Inventor
Nobuhiro Minotani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sanyo Electric Co Ltd
Original Assignee
Sanyo Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sanyo Electric Co Ltd filed Critical Sanyo Electric Co Ltd
Priority to JP11015778A priority Critical patent/JPS5536976A/ja
Publication of JPS5536976A publication Critical patent/JPS5536976A/ja
Publication of JPS6120153B2 publication Critical patent/JPS6120153B2/ja
Granted legal-status Critical Current

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JP11015778A 1978-09-05 1978-09-05 Production of semiconductor device Granted JPS5536976A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11015778A JPS5536976A (en) 1978-09-05 1978-09-05 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11015778A JPS5536976A (en) 1978-09-05 1978-09-05 Production of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5536976A JPS5536976A (en) 1980-03-14
JPS6120153B2 true JPS6120153B2 (enrdf_load_stackoverflow) 1986-05-21

Family

ID=14528489

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11015778A Granted JPS5536976A (en) 1978-09-05 1978-09-05 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5536976A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5749270A (en) * 1980-09-09 1982-03-23 Matsushita Electric Ind Co Ltd Manufacture of semiconductor device
US4725872A (en) * 1985-02-25 1988-02-16 Tektronix, Inc. Fast channel single phase buried channel CCD

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5389374A (en) * 1977-01-18 1978-08-05 Toshiba Corp Production of semiconductor device

Also Published As

Publication number Publication date
JPS5536976A (en) 1980-03-14

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