JPS6115591B2 - - Google Patents
Info
- Publication number
- JPS6115591B2 JPS6115591B2 JP53118135A JP11813578A JPS6115591B2 JP S6115591 B2 JPS6115591 B2 JP S6115591B2 JP 53118135 A JP53118135 A JP 53118135A JP 11813578 A JP11813578 A JP 11813578A JP S6115591 B2 JPS6115591 B2 JP S6115591B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- oxide film
- gate
- polycrystalline silicon
- transfer electrodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
- H10D84/01—Manufacture or treatment
- H10D84/0198—Integrating together multiple components covered by H10D44/00, e.g. integrating charge coupled devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
- H10D84/01—Manufacture or treatment
- H10D84/02—Manufacture or treatment characterised by using material-based technologies
- H10D84/03—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology
- H10D84/038—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology using silicon technology, e.g. SiGe
Landscapes
- Solid State Image Pick-Up Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11813578A JPS5543890A (en) | 1978-09-22 | 1978-09-22 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11813578A JPS5543890A (en) | 1978-09-22 | 1978-09-22 | Manufacture of semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5543890A JPS5543890A (en) | 1980-03-27 |
| JPS6115591B2 true JPS6115591B2 (enrdf_load_stackoverflow) | 1986-04-24 |
Family
ID=14728908
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11813578A Granted JPS5543890A (en) | 1978-09-22 | 1978-09-22 | Manufacture of semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5543890A (enrdf_load_stackoverflow) |
-
1978
- 1978-09-22 JP JP11813578A patent/JPS5543890A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5543890A (en) | 1980-03-27 |
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