JPS5521183A - Method of manufacturing semiconductor device - Google Patents

Method of manufacturing semiconductor device

Info

Publication number
JPS5521183A
JPS5521183A JP9523778A JP9523778A JPS5521183A JP S5521183 A JPS5521183 A JP S5521183A JP 9523778 A JP9523778 A JP 9523778A JP 9523778 A JP9523778 A JP 9523778A JP S5521183 A JPS5521183 A JP S5521183A
Authority
JP
Japan
Prior art keywords
film
oxide film
silicon oxide
silicon
polycrystalline silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9523778A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6210034B2 (enrdf_load_html_response
Inventor
Masashi Omori
Sotohisa Asai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP9523778A priority Critical patent/JPS5521183A/ja
Publication of JPS5521183A publication Critical patent/JPS5521183A/ja
Publication of JPS6210034B2 publication Critical patent/JPS6210034B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Non-Volatile Memory (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Semiconductor Memories (AREA)
JP9523778A 1978-08-03 1978-08-03 Method of manufacturing semiconductor device Granted JPS5521183A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9523778A JPS5521183A (en) 1978-08-03 1978-08-03 Method of manufacturing semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9523778A JPS5521183A (en) 1978-08-03 1978-08-03 Method of manufacturing semiconductor device

Publications (2)

Publication Number Publication Date
JPS5521183A true JPS5521183A (en) 1980-02-15
JPS6210034B2 JPS6210034B2 (enrdf_load_html_response) 1987-03-04

Family

ID=14132145

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9523778A Granted JPS5521183A (en) 1978-08-03 1978-08-03 Method of manufacturing semiconductor device

Country Status (1)

Country Link
JP (1) JPS5521183A (enrdf_load_html_response)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59177882A (ja) * 1983-03-28 1984-10-08 トヨタ自動車株式会社 内燃機関用点火プラグ及び点火方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59177882A (ja) * 1983-03-28 1984-10-08 トヨタ自動車株式会社 内燃機関用点火プラグ及び点火方法

Also Published As

Publication number Publication date
JPS6210034B2 (enrdf_load_html_response) 1987-03-04

Similar Documents

Publication Publication Date Title
JPS55160444A (en) Manufacture of semiconductor device
JPS5521183A (en) Method of manufacturing semiconductor device
JPS529897A (en) Manufacturing method of thin oxide semiconductor film
JPS5624937A (en) Manufacture of semiconductor device
JPS52124860A (en) Electrode formation method for semiconductor devices
JPS52120774A (en) Semiconductor device
JPS5793530A (en) Semiconductor device
JPS5415669A (en) Manufacture of mesa-type semiconductor device
JPS5559778A (en) Method of fabricating semiconductor device
JPS524789A (en) Semiconductor equipment
JPS51113461A (en) A method for manufacturing semiconductor devices
JPS52144288A (en) Preparation of electrode in semiconductor device
JPS51115777A (en) Manufacturing method of a semiconductor apparatus
JPS5411688A (en) Manufacture for semiconductor device
JPS52104881A (en) Manufacture for semiconductor device
JPS53145572A (en) Production of semiconductor device
JPS5345170A (en) Formation of non-oriented semiconductor
JPS5272171A (en) Production of semiconductor device
JPS5568650A (en) Manufacturing method of semiconductor device
JPS5247685A (en) Process for production of mos type semiconductor device
JPS5518042A (en) Method of fabricating semiconductor device
JPS5370685A (en) Production of semiconductor device
JPS55138833A (en) Manufacture of semiconductor device
JPS5218183A (en) Semiconductor device
JPS53125776A (en) Manufacture for semiconductor device