JPS55146935A - Manufacturing of semiconductor device - Google Patents

Manufacturing of semiconductor device

Info

Publication number
JPS55146935A
JPS55146935A JP5464579A JP5464579A JPS55146935A JP S55146935 A JPS55146935 A JP S55146935A JP 5464579 A JP5464579 A JP 5464579A JP 5464579 A JP5464579 A JP 5464579A JP S55146935 A JPS55146935 A JP S55146935A
Authority
JP
Japan
Prior art keywords
parallel
anisotropy
substrate
electrodes
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5464579A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6337510B2 (enExample
Inventor
Hisashi Haneda
Tetsuo Ichikawa
Yuki Shimada
Hideyoshi Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
NTT Inc
Original Assignee
NEC Corp
Nippon Telegraph and Telephone Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Telegraph and Telephone Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP5464579A priority Critical patent/JPS55146935A/ja
Publication of JPS55146935A publication Critical patent/JPS55146935A/ja
Publication of JPS6337510B2 publication Critical patent/JPS6337510B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices

Landscapes

  • Weting (AREA)
JP5464579A 1979-05-02 1979-05-02 Manufacturing of semiconductor device Granted JPS55146935A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5464579A JPS55146935A (en) 1979-05-02 1979-05-02 Manufacturing of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5464579A JPS55146935A (en) 1979-05-02 1979-05-02 Manufacturing of semiconductor device

Publications (2)

Publication Number Publication Date
JPS55146935A true JPS55146935A (en) 1980-11-15
JPS6337510B2 JPS6337510B2 (enExample) 1988-07-26

Family

ID=12976504

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5464579A Granted JPS55146935A (en) 1979-05-02 1979-05-02 Manufacturing of semiconductor device

Country Status (1)

Country Link
JP (1) JPS55146935A (enExample)

Also Published As

Publication number Publication date
JPS6337510B2 (enExample) 1988-07-26

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